Measurements of the Flat Band Voltage across the wafer PQC FIRENZE.

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Presentation transcript:

Measurements of the Flat Band Voltage across the wafer PQC FIRENZE

MOS Standard Moon MOS 2, STM measures Vfb on this side MOS 3 MOS 4 PQC FIRENZE OB2 Wafer

MOS 1 MOS2 STM MOS3 MOS PISA PISA PISA PISA No variation in the result performing the measurements at 75 or 100 KHz Batches rejected due to high Flat Band Voltage (and also high surface currents) in 2003 PISA 75 ( , , ) PERUGIA 36 ( , ) PISA 79 ( ) PISA 81 ( , , , ) PQC FIRENZE N.B. STM values to be compared with MOS PISA PISA

PQC FIRENZE PISA Vfb values from Standard Moon and Vfb from STM PQC STM PISA PISA PISA PISA PISA PISA PISA PISA PISA PISA PQC STM PISA PISA PISA PISA PISA PISA PISA PISA