 It was found that phosphoric acid etching will not degrade electrical properties of the devices. It was also found that we can enhance the LED output.

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Presentation transcript:

 It was found that phosphoric acid etching will not degrade electrical properties of the devices. It was also found that we can enhance the LED output intensity by 30% using phosphoric acid etching. 9

 OMDL “ LED 碩 0 課程簡報 ”  施敏 “ 半導體元件物理與製作技術  C. C. Kao, H. C. Kuo, H. W. Huang, J. T. Chu, Y. C. Peng, Y. L. Hsieh, C. Y. Luo, S. C. Wang, C. C. Yu, and C. F. Lin, “Light-output enhancement in a nitride-based light-emitting diode with 22 undercut sidewalls,”  S. J. Chang, W. C. Lai, Y. K. Su, J. F. Chen, C. H. Liu, and U. H. Liaw, “InGaN–GaN multiquantum well blue and green light emitting diodes,” 10

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