Furnaces and wet benches Savitha P

Entry submitted for KLA Tencor contest: “Very informative and precise entry”, as per KLA – Thank you Prof. Akshay Naik All first nano furnaces and wet benches working fine after the maintenance RTP gas line hook up scheduled next week – Waiting for the pump delivery Tempress furnace under maintenance – Problems with the thermocouple, heating element – Replace? (~Rs.50,000 & Rs.4,90,000/- respectively) – Difficulty in finding a source for a small POCl3 bubbler Update

Current status Will try to make all tubes operational with the available resources – Boron diffusion (BN disc), Metal anneal, dielectric anneal/oxidation, Phosphorus diffusion? – Manage offsets – Painting and power coating to improve appearance – Option of a solid source for Phosphorus deposition (active component Silicon Pyrophosphate (SiP2O7) carried on an inert porous Silicon Carbide (SiC) substrate – single disc $111). Current Status

Some pics Wooden legs covered with Al films Stainless Steel legsBeforeAfter

Cleaning

Thank you