Zyvex Microassembly Capability Micro-interferometer 7 July 2005 Matt Ellis Senior Scientist James Wylde Applications Engineer

Outline Zyvex Corporate Overview Micro Interferometer Concept Current Micro Interferometer Demonstrator Backup Information: Micro Assembly Capabilities Micro Assembled Device Reliability Advantages to Zyvex Microassembled Approach

Zyvex Corporate Overview

Privately held company founded in 1997 Located in Richardson, Texas (near Dallas) 10 Products 5 active government grants Aggressive IP strategy - 18 issued patents, 46 in process Headcount: 52 and increasing —15 Ph.D.s, 7 M.S. —33 Engineers, scientists, technical management 44,000 sq. ft. facility Equipment: SEMs (with nano- manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station Corporate Overview

Nanomaterials —CNT functionalization —CNT processing Microassembly —Assembly of microcomponents (MEMS-based) for integrated microsystems Nanomanipulators (S100, F100, A100, L100) —Characterization and manipulation of nanostructures in SEM, FIB, optical microscopes Corporate Overview

Assembly Program Overview NIST-ATP, Five-year (Oct 2001-Dec2006), $25M research award Title: Assemblers for Nanotechnology Applications and Manufacturing: Enabling the Nanotechnology Era Zyvex and partners will develop low-cost, computer controlled, microscale assemblers that operate in parallel to assemble three- dimensional, microscale components. Team consists of Honeywell as our Joint Venture Partner; University of Texas at Dallas, and University of Virginia as sub- contractors.

Example - Micro-assembled Device

Micro Assembled Interferometer

Small size (1 cm 3 ) self contained micro assembled interferometer that can be used for sub micron positioning (2.5 nm) displacement sensing over ~ 10 mm travel Design Concept

Self-contained Unit —Laser, detector, and optics integrated with optics using Zyvex micro- assembly techniques —Integrated signal conditioning —Small size (integrated unit ~1cm 3 ) / low weight Versatility —Small sizes means device can be mounted unobtrusively —No allowance needed for optical cabling, external laser, large control box, etc —Device can be mounted on moving elements in vibration environment, reducing need for vibration consideration or large air tables Cost target —$3000/axis in development quantities —$2000/axis for production volumes –With automated assembly and test Key Features / Advantages

Target Markets / Applications Key FeatureAerospaceSemi-conductorManufacturing and Automation Low WeightSpace flight (antenna, etc) Vibration Environments Low CostWafer Dicing SawsDiamond lathes and turning tools Small SizeAntenna positioningMetrology Tools Optical alignment / lithography tools Triangulation Detectors Linear displacement

Roadmap Milestone DateRange / Resolution PackageComments Mar mm / 500 nmBreadboardHomodyne micro- assembled optics technology demonstrator Apr mm / 5 nm“Big Box”Homodyne, demonstrate integrated packaging and E/O Jul mm / 2.5 nmButterfly or DIP style Demonstrate 2xPD or heterodyne architecture, integrated micro-controller Sep mm / 2.5 nmCustom “Cube”Alpha Release Fall 2005Trials and Demonstrations with advance customers Feedback on specifications, performance, application

Micro interferometer configuration —Homodyne detection –Three photodetectors -One for laser diode intensity -Two for quadrature detection —Signal conditioning in package System overview

Optics and Electronics Ceramic PCB with interconnect and signal conditioning electronics Micro optical bench with detectors, optics, and light source

Micro optical bench Photodetectors Micro optical bench Beam splitters Laser diode Fixed mirror

Interferometer Optics Micro-assembly of base plate and optics

Test Platform Zyvex SiOB External LD Machined test bench

Initial system tests —Machined test bench with microassembled Si components —Tested with HeNe laser —Tested with 650 nm laser diode —Sufficient fringe contrast available for counting fringes over 10 mm of travel

Package Zyvex Can Provide SiOB / optics E/O Micro controller Optical I/O Conditioned Signal Supply

Need Partnership For: Technical advice and feedback Market acceptance and penetration / application expertise Support infrastructure Human interface

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