An Introduction to SIMS and the MiniSIMS alpha © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com

Secondary Ion Mass Spectrometry (SIMS) & The Millbrook MiniSIMS

The SIMS Process simulation courtesy of Dr Postawa Zbigniew at the Jagiellonian University in Poland

A Conventional SIMS System

The MiniSIMS Instrument

Design Objectives Increase routine use of Surface Analysis more affordable more accessible Not a replacement for conventional SIMS not state-of-the-art performance restricted analysis conditions

Transform one of these …..

….. into one of these.

Operational Strengths Low Capital & Running Costs Fast, On-Site Analysis Compact Design, Single Electrical Supply Full Automation & Control for Ease of Use High Reliability Rapid Sample Throughput Simplified Data Interpretation Remote Control via Internet

Static SIMS (Surface Analysis)

Static SIMS (Surface Analysis)

Characterisation of Layer Structurally significant peaks

Characterisation of Layer Structurally significant peaks

Light Element Detection

Dynamic SIMS (Depth Analysis)

Dynamic SIMS (Depth Analysis)

Before Annealing

Copper has diffused into silicon oxide After Annealing Copper has diffused into silicon oxide

Profile Before Annealing

Profile After Annealing

Imaging SIMS (Spatial Analysis)

Imaging SIMS (Spatial Analysis)

Distribution of Organic Film Incomplete coverage of both organic and inorganic components in a battery electrode CxHyOz- (blue) and Li+(red) on Al+ (green) Image size 4.5 mm x 4.5 mm

Distribution of Metal Overlayer Uneven coverage of the silver coating on the contacts of a semiconductor connection frame Cu+ (red) and Ag+ (green) Image size 3.0 mm x 3.0 mm

Typical Applications for the MiniSIMS alpha Repetitive analysis (quality monitoring) Large area organic surface contamination Fast imaging of millimetre scale areas 3 dimensional analysis of multi-layer structures Comparative rather than quantitative analysis

Typical Application Areas Surface Coatings Surface Treatments Electronic Components Semiconductors Electrodes & Sensors Catalysts Adhesives Lubricants Packaging Materials Corrosion Studies

Alternatives to a MiniSIMS ? No Other Benchtop SIMS Instrument Conventional SIMS Systems much more complex and expensive Contract Analysis Laboratories not convenient, contamination during transport Other Surface Analysis Techniques generally less sensitive

Comparison of SEM / EDS and SIMS

Advantages of SEM / EDS High magnification physical image Quantitative elemental information

Advantages of SIMS Surface specific analysis Organic structure identification Profiling for depth distribution Light element detection

EDX sampling depth is typically 1 micron For many applications surface sensitivity is needed… 509 m Not 100 x Not 10 x But 1000 x – SIMS can offer true surface analysis EDX sampling depth is typically 1 micron

Conclusions SIMS & EDS give complementary information SIMS has advantages for Organic surface contamination 3 dimensional analysis of multi-layer structures SEM / EDS has advantages for High magnification physical imaging Quantitative analysis

Summary A summary of the presentation on the TOF option for the MiniSIMS

MiniSIMS Summary SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films Information easily available by SIMS may be difficult or impossible by any other technique SIMS is especially valuable for the detection of:- organic species (e.g. silicones, fluorocarbons) light elements (lithium, beryllium, boron …) group IA & IIA metals, group VII halides

MiniSIMS Summary SIMS is a fast analysis technique, especially for imaging applications MiniSIMS alpha is most applicable for running routine repetitive analyses Desktop MiniSIMS means SIMS is now affordable and accessible to all