Survey of MEMS, MOEMS, Optoelectronic and Other Solid State Devices Nathaniel J. C. Libatique, Ph.D.

Optoelectronics Flash Memory Flash Memory Laser Diodes Laser Diodes Charge Coupled Devices Charge Coupled Devices Waveguide Modulators Waveguide Modulators Avalanche Photodetectors Avalanche Photodetectors High Electron Mobility Transistors High Electron Mobility Transistors Memristors Memristors

MEMS and MOEMS Labs on a chip and Microfluidics Labs on a chip and Microfluidics Digital Light Processor Digital Light Processor Accelerometers Accelerometers Optical Switches Optical Switches Pressure Sensors Pressure Sensors

Other Devices Peltier Coolers Peltier Coolers High Density Magnetic Storage (GMR) High Density Magnetic Storage (GMR) SQUIDs SQUIDs Chemo-Optoelectronic Sensors: Micro-assays Chemo-Optoelectronic Sensors: Micro-assays

HDDs Hitachi Introduces 1-Terabyte Hard Drive Colossal storage reaches new milestone with a drive that holds 1000 gigabytes. Melissa J. Perenson, PC World Jan 5, :00 pm Hitachi Global Storage Technologies is first to the mat with an announcement of a 1-terabyte hard disk drive. Industry analysts widely expected a 1TB drive to ship sometime in 2007; Hitachi grabbed a head start on the competition by announcing its drive today, just before the largest U.S. consumer electronics show starts next week.

E-Ink

MEMS

Homework Collect paper(s) focused on a particular device and prepare for one or several discussions about its: Function and applications Function and applications Principle of operation Principle of operation Fabrication Fabrication Limits of operation (dimensional limits, fabrication limits, noise floor, speed limits, etc) Limits of operation (dimensional limits, fabrication limits, noise floor, speed limits, etc) Potential new applications (e.g. biomedical) Potential new applications (e.g. biomedical)

HEMT Applications in low noise, high bandwidth applications Carriers provided in doped AlGaAs AlGaAs ternary has larger bandgap than GaAs Conduction in low-impurity InGaAs channel

Flash Memory NOR Flash Floating Gate Transistor Floating Gate stores charge and modifies device characteristics

Applications include: Spectroscopy WDM communications Metrology Tunable Lasers

Sandia MEMS Process Cross-section diagram of the SUMMiT V™ Process layers: 4 structural layers, 1 ground/interconnect layer, and 4 sacrificial oxide layers.

Double Ratchet Actuator AutoCAD layout

After Sacrificial Oxide 1 Etch

After Sacrificial Oxide 2 Etch

After Polysilicon 2 Etch

After Sacrifial Oxide 3 Etch

After Polysilicon 3 Etch

After Polysilicon 4 Etch

Final Release