Ceramic Servo Motors

Traditional Piezo VS Reversed Piezo VS Ultrasonic Standing Wave Theory Of Operation Traditional Piezo VS Reversed Piezo VS Ultrasonic Standing Wave

Piezo Direct and Reverse Effect

Poling a Piezo Element

Basic Structure of Nanomotion’s Piezoelectric Element

Ultrasonic Standing Waves Bending Mode Longitudinal Mode Simultaneous excitation of both modes creates motion at the edge of motor fingertip Slide + =

Finite Element Simulation Longitudinal Mode Bending Mode

Motor Ellipse Amplitude of ellipse varies with voltage Slow speed – ellipse at the few nm level High speed- ellipse at the tens of microns The larger the ellipse, the more the mechanical stress, the more the heat, the less the duty cycle

Nanomotion Motor Basics Linear Stage PZT Rotary Table PZT Linear Motion Rotary Motion

Motor Assembly

Motor Features Standard motors for most operating environments Unlimited travel with small operating package (Drive strips to 4m length) Superior move & settle & Slow speed CV Vacuum motors for high and UHV Up to 10-10 Torr Non-Magnetic motors / No EMI from motor No servo dither & no hysteresis Built in holding / braking without power consumption Wide range of dynamic performance (Resolution to 1nm, velocity from 1u/sec to 300mm/sec) Cost effective direct drive solution

New ‘high volume’ industrial motor. The “EDGE” New ‘high volume’ industrial motor. Low voltage Supported by ASIC based driver Low price in volume Performance Characteristics Max velocity: 150mm/sec Max force: 30g (.3N) Highest resolution: 1um Requires straight slide (to 10um)

The “EDGE” Drive System Market Positioning The Edge is supported by a dual axis ASIC 2 independent drive/control or one drive for (2) motors. ASIC is a complete drive + simple control, programmed via I2C protocol. Can close the loop at 5um resolution (30k counts/sec) ASIC drive available with +/-10vdc input for use with external servo controller. Market Positioning Mid to high volume industrial markets Biomedical: Pumps, biometric security, Drug delivery Military/Aerospace: Aperture control, shutters, target manipulation Vision: Industrial focus/zoom

The “EDGE” Benefit / Feature Target Applications SIZE: Smallest closed loop servo motor SAFETY: Low voltage for medical applications POWER: .3N force COST: Low price in volume Target Applications Aperture/Shutter control (vision, laser, etc) Medical devices (pumps, wands, fluid control) Vision/Industrial focus/zoom

DuraMotor Next Generation Motor by Nanomotion For Better Productivity and Cleanliness at Challenging Motion Conditions

DuraMotor Introduction Critical factor definition in vacuum environment Operating Conditions Experimental results and analysis Summary and conclusions Design recommendations

Introduction Nanomotion products are serving a wide range of applications Challenging applications are often involved with high cleanliness requirements Semiconductor, FPD, data storage, high resolution microscopy Medical, military, and Nanotech applications with analytical instruments Main factors impacting performance at the above conditions Stage stiffness Motion dynamics Vacuum VS Ambient environment Control optimization DuraMotor was designed for Operation at challenging motion environments to achieve HIGH PRODUCTIVITY High dynamics – acceleration, velocity Vacuum environment High duty cycle Full compatibility with the HR motor family Seamless integration with existing servo or open loop systems DuraMotor was designed for high productivity stage by allowing extreme dynamics (speed and acceleration) at high motion performance without compromising on particle.

Critical Factor Definition at Vacuum applications Experimental Comparison for Standard HR Motors In this phase we have screened the relevant parameters and mapped the critical factors for our specific experiments (see TESTED OPERATIONAL CONDITIONS foil) Stage Stiffness and Motion Dynamics are the Critical Factors

Design Recommendation DuraMotor is recommended for challenging vacuum and ambient applications High stiffness stage is the most critical factor for the motor performance with low particles level Servo parameter optimization is essential to avoid vibrations which contribute to particles during dynamic move profiles Both HR and DuraMotor are suitable to use at high stiffness and well controlled servo systems A stiff stage design with DuraMotor allows for high productivity (dynamics) and cleanliness in motion systems

DuraMotor Benefit / Feature Target Applications CLEANLINESS: Reduced particle generation DURABILITY: Higher accel rates, more aggressive move profiles. Target Applications Semiconductor vacuum stages for wafer inspection, E-beam & Ion beam microscopes XY & Z motion for medical microscopes Any application that is sensitive to contamination

The “Flex DC”

Product Configuration Flex DC Product Configuration Single Axis (AB1A or AB5) Dual Axis (AB1A, AB5, or Mixed) 8 kHz Servo Update Rate DAC Output +/-10v, 16 bit Easy to use GUI RS232, Ethernet, and CAN-open interface Quadrature Encoder input Sin/Cosine Multiplier Option

Flex DC Hardware I/O AC Input (wall) 8 x Digital Isolated Inputs 2 x Digital Isolated Outputs 2 x Digital Fast Inputs 2 x Digital Fast Outputs AC Input (wall) 100 – 240 VAC, 50-60 Hz

PID or PIV Control Algorithm Data Recording Nanomotion Algorithms for: Flex DC Software PID or PIV Control Algorithm Data Recording Nanomotion Algorithms for: Deadband Ultra-High Resolution Positioning Thermal Protection (to come)

Flex DC Board level dual axis option Board level 4 axis option Rack mounted box with 4 axis (TBD)

Flex DC Benefit / Feature Target Applications SINGLE RESPONSIBLITY: Eliminating all the guess work of interfacing drives & controls EASE OF USE: Simple front end GUI and strong factory support (from Nanomotion) PLUG & PLAY: Set up for any FB motor and encoder to plug directly into the controller COMMUNICATIONS: RS232, Ethernet, CAN-Open Target Applications EVERY FB or CUSTOM STAGE CUSTOMER (you will not sell many of these without our motors. It is a support product.

Stages Nanomotion continues to expand its offering of standard stages and custom motion systems to be a provider of complete motion solutions.

“Nanomotion” Standard Stages FB Linear Stages Sizes: 50mm to 150mm wide Travels: up to 300mm Resolutions: 1um to 10nm Single and multi axis FBR Rotary Stages 60mm output diameter (150mm diameter available) Resolution of 5 to 0.5 arc seconds Single or multiple HR2 motors

Custom Motion Systems Nanomotion’s first “hybrid” motion platform, combining two axis of Nanomotion motors with one axis of ballscrew and step motor drive.

Custom & Semi-Standard Motion Systems Motion systems that utilize standard components of bearings, slides and encoders, but require custom machined assembly housings creates distinction in the market place.

Custom Drive Electronics Nanomotion has designed and manufactured many custom drive configurations for customer applications. Small multi axis amplifiers 4 channel card for HR1 motors Miniature amplifiers with TTL inputs To drive ST or MM motors Nanomotion will look to standardize an offering of smaller electronics (based on motor sizes). Do not let electronics packaging be an obstacle to developing an application.

Drive Technology Comparison

Drive Technology Comparison 2 Piece Construction ?? Piece Construction

Drive Technology Comparison Nanomotion positions its ceramic servo motors against other applications using step or servo motors or stages with closed loop rotary step or servo motors (using ball/lead screw) or brushless linear servo motors.

Positioning with respect to other motion technologies Motor Drive Feedback Configuration Step Motor Lead/ball screw None Open Loop Rotary Encoder Closed Loop Servo Motor Linear Encoder Ceramic Servo Motor DC Linear Servo Motor

Drive Technology Comparison VS

Performance Comparison Travel Accuracy / Repeatability Velocity Accel / Decel Load Dynamic/Static Stiffness Smoothness of Motion Control Interface Special Environments Cost

Travel Comparison Travel can be configured for any length in both systems Once ballscrew length is defined, travel is fixed Ballscrew has length limitations by diameter and bearing span Nanomotion can travel any length defined by bearing structure Advantage: Ceramic Servo Motors

Accuracy / Repeatability Comparison Nanomotion relies on direct feedback on the motion platform and does NOT induce any potential errors from mounting or compliance. Ballscrews can use either linear or rotary encoders which can introduce errors related to lead error, screw mounting, or compliance. Ceramic servo motors have no negative effects with respect to accuracy and work to the limit of the feedback. Advantage: Ceramic Servo Motors

Velocity Comparison While ballscrews are limited by the pitch and critical speed, based on mounting, Nanomotion’s motor technology is limited to 250mm/sec. High pitch ballscrews can go much faster Advantage: Ballscrews & Rotary Motor for Speed However, Nanomotion has a significantly higher bandwidth in velocity, with a ratio of 1:250,000 Advantage: Ceramic Servo Motors for Range

Accel /Decel Comparison In terms of pure acceleration, Nanomotion has achieved rates in excess of 10g’s. Ballscrews have a practical limit of ~1g, before balls start jamming in the return tubes. While ceramic servo motors can achieve a high rate, it is very load dependent. Advantage: Shared / Application Dependent

Load Comparison While ceramic servo motors are competitive within the defined speed/force curves, the mechanical advantage of the ballscrew is much greater than the force capability of our direct drive. Advantage: Ballscrew & Rotary Motor

Dynamic Stiffness Comparison Dynamic stiffness is a function of the motor response, control loop, and mechanical system. The compliance in a rotary motor – coupling- bearing mount- ballscrew creates a much slower response. The direct drive of a motor coupled to the load, without any internal motor inertia, makes ceramic servo motors a much faster responding technology Advantage: Ceramic Servo Motors

Static Stiffness Comparison The static stiffness of the ballscrew can be significantly higher that the ceramic servo motors. However, it is dependent on the shaft bearing configuration and type and ball nut preload. Advantage: Ballscrew & Rotary Motor

Smoothness Comparison The impact of ball bearings running in/out of preload creates vibration that will be transmitted to the mechanical structure. The issues of ball screw pitch diameter variations and preload variations create torque fluctuations that will effect smoothness of travel. Ceramic servo motors do not effect the bearing structure and can travel smoothly at the level of 1 micron/sec. Advantage: Ceramic Servo Motors

Control Interface Comparison Most rotary servo motors and amplifiers have the ability to accept step/direction inputs as well as analog inputs Nanomotion amplifiers are limited: +/-10 vdc analog input SPI digital input However, the new AB5 allows use with ANY controller that provides +/-10 vdc, including PLC’s Advantage: Ballscrew & Rotary Motor

Special Environment Comparison Nanomotion’s ceramic servo motors are well suited to: Vacuum & UHV High Magnetic Field Clean Room Radiation High RF Rotary motors with ballscrews (and lubricants) are far more limited Advantage: Ceramic Servo Motors

Comparison Summary Characteristic Advantage Travel Nanomotion Accuracy/Repeatability Velocity Max Speed –Ballscrew Bandwidth -Nanomotion Accel / Decel Even Load Ballscrew Dynamic Stiffness Static Stiffness Smoothness Control Interface Special Environments Cost

Comparison Summary Ceramic Servo Motors bring advantages in size, simplicity, force per volume, dynamic performance, and cost over traditional drive technology.