Piezo-Ceramic Servo Motors

Linear, Rotary or Spherical Motion

Agenda Corporate Overview Theory of Operation Product Features Applications Question / Answer

Corporate Introduction Nanomotion Established in 1992 for the design, manufacture and marketing of piezo-ceramic motors and electronics (for linear and rotary motion) Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3 million motors/day) Saia Burges (step motors, switches, solenoids) Nihon Mini Motor (step & dc motors for camera & dvd) Parlex (flex circuits and contract mfg) Nanomotion is 65 people with ~35% in the engineering and R&D. >75,000 motors in field >10,000 linear axes in the field >Shipping 700k motors in 2008, for cell phone auto focus

Nanomotion Theory of Operation Traditional Piezo VS Reversed Piezo VS Standing Wave

Piezo Direct and Reverse Effect

Poling a Piezo Element

Basic Structure of Nanomotion’s Piezoelectric Element

Nanomotion Motor Basics Ultrasonic Standing Waves Bending Mode Longitudinal Mode Simultaneous excitation of both modes Creates motion at the tip of the motor finger PZT Element Slide + =

Finite Element Simulation Longitudinal Mode Bending Mode

“Ultrasonic Standing Wave”

Motor Ellipse Amplitude of ellipse varies with voltage Slow speed – ellipse at the few nm level High speed- ellipse at the tens of microns The larger the ellipse, the more the mechanical stress, the more the heat, the less the duty cycle

Nanomotion Motor Basics Linear Stage PZT Rotary Table PZT Linear Motion Rotary Motion

Same Motor for Linear or Rotary Motion

Motor Assembly

Motor Features Standard motors for most operating environments Unlimited travel with small operating package (Drive strips to 4m length) Superior move & settle & Slow speed CV Vacuum motors for high and UHV Up to 10-10 Torr Non-Magnetic motors / No EMI from motor No servo dither & no hysteresis Built in holding / braking without power consumption Wide range of dynamic performance (Resolution to 1nm, velocity from 1u/sec to 300mm/sec) Cost effective direct drive solution

Nanomotion Applications

Edge Motor & ASIC for Optical Image Stabilization

‘High volume’ industrial motor. The “EDGE” ‘High volume’ industrial motor. Low voltage Supported by ASIC based driver Low price in volume Performance Characteristics Max velocity: 150mm/sec Max force: 30g (.3N) Highest resolution: 1um Requires straight slide (to 10um)

Nanomotion Applications Bio-Medical/Pharmaceutical Instrumentation Microscopy Hand-held devices and tools (pumps, endoscopes) Military/Security Aperture/Shutter Control Auto Focus Pan & Tilt Semiconductor SEM & ION beam Wafer Metrology Storage media Metrology and Assembly Automation Consumer Products (cell phone, digital camera)

Nanomotion Solution

ION Beam Etching of MEMs 4 Axis (X/Y/Z/T) Vacuum Rated Low Magnetic Field (VN motors, SS Bearings) Spring Counterbalance in Z Resolution of 100nm (available to 10nm)

Multi Axis X Ray Inspection System 2Axis (X/Y) X-Ray Inspection (radiation environment) Demonstrated ability to use vibration cancellation with AB2/DC Mode.

Multi Axis Stage 3 Axis (X/Z/T) Laser assisted – Chemical Micromachining for Semicon & Biomedical applications.

6 Axis Hexapod Travel in XYZ + Pitch/Roll/Theta Parallel Kinematics eliminating stacked axis errors Equal stiffness in all directions

Biomedical Application Base Cell Imaging (Cytopathology, Gene/DNA analysis) Microscopes Hand held imaging tools Surgical Robots & Manipulators (MRI compatible) Microfluidics (drug discovery & development) Pumps & Micro Pumps Proteomics & Dispensing End User Device Manufacturing (Angioplasty balloons, implant devices)

Virtual Microscopy: Scan on-the-fly Digitized entire microscope slide with line scan operation Motion system resolution to 50nm X: Index Axis Y: Scan Axis Z: Auto Focus Axis Constant Velocity for scanning and integrated Z axis for managing Cell Terrain Table Top Machine

Cell Imaging: Move & Settle Rapid scan & locates 22 areas of interest (field of view) with step and repeat motion Slide imaged in 4 min/ 360 slides per day. Improve Sensitivity & Specificity (false positive)

Multi Layer Tissue Imaging Cross sectional imaging for women’s health Lower cost diagnosis than pap smear and can be made widely available to under developed countries. Miniature motion system to move lenses inside the body

Cell Imaging Benefit Ability to achieve high move & settle rate due to inherent motor braking capability Higher resolution, faster moves for increased throughput and image accuracy. Ability to track autofocus, on-the-fly. Highest performance in smallest motor/stage package Simple drive assembly (2 piece construction) Cost effective technology compared to other devices

Auto Focus Axis Resolution from 10nm to 100nm DuraMotor option for continuous step operation Spring counter-balance for optics Anti-migration crossed rollers for vertical operation Available with a variety of motor sizes

neuroArm neuroArm robotic system is a 2 robotic arms, each with 6 degrees of freedom for extra & intra-cranial functions (ultimately for spinal surgery)

Biomedical Device Applications MRI Process (with non-magnetic motors Robotic arm for micro surgery of the brain MRI breast biopsy Other diagnostic tools  

MRI Probes (Brain & Prostate)  

MR Tumor Ablation A B C Prostate Boundary Spatial Heating Pattern Target Boundary Direction of rotation Heating Applicator A B C

Biomedical / Bioprocessing Automation Automation for Drug Discovery/Development Motion modules for precise dispensing of syringes, capable of reaching 9mm pitch Laboratory Robots for DNA Analysis Chromatography

Biomedical /Pharmaceutical Flow Cytometry Cell Analysis Medical Robot (end of arm tooling / grippers) Micro-Fluidics Dispensing Pumps

Precise Dosage from the smallest available non-magnetic servo motors Miniature Motors for Drug Delivery Pumps Precise Dosage from the smallest available non-magnetic servo motors

Non-Consumer Vision Applications Industrial Vision Applications for: Security identification Medical imaging Part inspection

Gastro- Pill & Endoscope Auto Focus Nanomotion’s expertise in combining miniature motors with small optics and electronics lends itself exceptionally well to medical devices used on the surface or internal to the body. Miniature motor embedded in an optics module provides focus capability for gastrointestinal camera Miniature motor/optics module for focus of endscopy

Military/Security Application Base Aperture/Shutter Control Auto Focus Pan & Tilt

Aperture & Shutter Control Light weight Fast response Low power consumption Built in holding/braking without power

Auto Focus Focus & Zoom capability Ability for rapid moves Zoom Module Focus & Zoom capability Ability for rapid moves Capability to hold position with high shock load Small package for auto focus Linear guide Moving lens B Fixed lens Moving lens A

Pan & Tilt Assemblies Satellite tracking XRay beam focus Platform used for: Satellite tracking XRay beam focus Optics positioning

Competitive Large Volume Application Small motors deliver performance in a restricted package. It pans a full 360º (non-continuous) and tilts 90º, giving you more coverage than multiple fixed cameras. No Noise Position Stability Long Distance focal capability

Semicon Application Base Ebeam /Ion Beam wafer processing Mask correction machines Surface analysis equipment Wafer inspection, processing, and packaging Hard disk drive certification Other storage media

(13) ST Motors on Nanotechnology tool                                                   

(24) ST Motors+ Closed loop XYZ assembly

Semiconductor / Electronics E-Beam writing & inspection Wafer Metrology Thin Film Measurement Head Testing Storage Media testing/ writing

Disk Media Testing Hard Disk Certification 2000 Tracks per hour Moves 1 to 15 um in 5msec & settle to 100nm. Inspection rates increase to 3000 and 4000 tracks per hour next year

Scan and Step

7 Axis SEM Motion Platform X Axis Tilt Axis Y Axis Rotary Axis (& 3 point leveling) Uses round bodied motor Bottom axis moves 65kg All motors vacuum/non-magnetic

Aerospace Application Base Space Vehicles Spectrometers Sensors                          

Custom Motion Platform Vacuum and UHV motion systems Providing high resolution positioning and stability Complete multi-axis system with drive and control

Metrology 3-Axis system for Optical Surface Scanning,

Assembly / Automation Long Travel Actuation (Travel to 4 meters) Inspection Device Pick & Place assemblies

Summary Ceramic Servo Motors deliver the most force per motor volume over conventional motor technology, making it well suited to a diverse application base of motion requirements. Ceramic Servo Motors are robust, with the ability to work in wide range of challenging environments. Nanomotion’s motors & amps can be used with any servo control, providing flexibility in applications.