Zn x Cd 1-x S thin films were characterized to obtain high quality films deposited by RF magnetron sputtering system. This is the first time report of the influence of substrate temperature of Zn x Cd 1-x S thin films prepared by co-sputtering of CdS and ZnS. Investigations show that higher substrate temperatures result in films of better crystallinity, higher optical transmission, larger grains and lower sheet resistances. On the other hand, energy band gap decreases slightly with temperature which might have been due to the improved crystalline nature of the material. Introduction Md. Sharafat Hossain 1, Md. Aminul Islam 2, T. Razykov 2, K. Sopian 2 and N. Amin 1,2 1 Faculty of Engineering and Built Environment, The National University of Malaysia, Bangi, MALAYSIA. 2 Solar Energy Research Institute (SERI) Universiti Kebangsaan Malaysia, Bangi, MALAYSIA *Corresponding Effect of Substrate Temperature on Zn x Cd 1-x S Thin Film Growth by RF Magnetron Sputtering Zn x Cd 1-x S thin films at low zinc content for a possible usage as window layer in CdTe thin film solar cells were deposited on bare soda lime glass substrates by RF magnetron co-sputtering of CdS and ZnS at different substrate temperatures. The substrate temperature was varied against several parameters, until best film characteristics were obtained. The composition of the thin films was controlled by varying the RF power of CdS and ZnS in such a ratio so that the zinc content in the thin films remained low. The crystallinity of the films increased with increasing deposition temperature. The optical absorption and transmission spectra were recorded within the range nm. The band gap of thin films showed slight decreasing trend for higher deposition temperature. From SEM, it was found that the thin films were formed by different clusters of grains which were changed to isolated grains as the deposition temperature increased. Moreover, electrical sheet resistance of the thin films was also investigated as a function of deposition temperature. This work confirms that deposition temperature has significant influence on the Zn x Cd 1- x S thin film properties grown by RF magnetron co-sputtering, which can be optimized for window layer to be suitable for CdTe thin film solar cells. 1.The RF power of CdS and ZnS was varied in such a ratio so that Zn x Cd 1-x S was deposited in low Zn concentration (≤0.2) and this concentration was achieved by varying the RF powers of CdS and ZnS. The desired composition (x=0.17) was found with RF power 40 Watt for CdS and 8 Watt for ZnS. 2. The Zn x Cd 1-x S thin films deposited at C showed four diffraction peaks of (002), (102), (110) and (103) belonging to strong wurtzite structure. The peak intensities of (002) diffraction line were increased with the increasing of deposition temperature which indicated that the thin films deposited at low temperature possessed poor crystallinity compared to the films deposited at high temperature. 3. The band gap of thin films showed slight decreasing trend for higher substrate temperature. 4. The transmittance of the films significantly increased in longer wavelength regions when the films were deposited at high temperature. 5. SEM analysis showed that that the thin films were formed by different clusters of grains which were changed to isolated grains as the substrate temperature increased. 6. The value of sheet resistance decreased from 2.4×10 5 to 1.4×10 2 Ω/□ with deposition temperature variation from C to C. 1.The RF power of CdS and ZnS was varied in such a ratio so that Zn x Cd 1-x S was deposited in low Zn concentration (≤0.2) and this concentration was achieved by varying the RF powers of CdS and ZnS. The desired composition (x=0.17) was found with RF power 40 Watt for CdS and 8 Watt for ZnS. 2. The Zn x Cd 1-x S thin films deposited at C showed four diffraction peaks of (002), (102), (110) and (103) belonging to strong wurtzite structure. The peak intensities of (002) diffraction line were increased with the increasing of deposition temperature which indicated that the thin films deposited at low temperature possessed poor crystallinity compared to the films deposited at high temperature. 3. The band gap of thin films showed slight decreasing trend for higher substrate temperature. 4. The transmittance of the films significantly increased in longer wavelength regions when the films were deposited at high temperature. 5. SEM analysis showed that that the thin films were formed by different clusters of grains which were changed to isolated grains as the substrate temperature increased. 6. The value of sheet resistance decreased from 2.4×10 5 to 1.4×10 2 Ω/□ with deposition temperature variation from C to C. Major Findings and Discussions Conclusion Bare soda lime glass (SLG) substrates were cleaned in an ultrasonic bath using acetone-ethanol-DI water solvents, sequentially for five minutes each followed by drying in a stream of dry nitrogen gas. After evacuation of the magnetron sputtering chamber to around Torr, CdS and ZnS targets (99.999% purity) were then co-sputtered on these cleaned bare glasses by varying the substrate temperatures from C to C by non-reactive RF magnetron sputtering in an argon gas ambient. The Kurt J. Lesker 4-gun model sputtering machine was used for sputtering of all the samples. Before starting deposition, the sputtering chamber was flushed by evacuation and purged with pure nitrogen gas for 3 times. Likewise, the targets (CdS and ZnS) was covered by the shutter and pre-sputtered for between minutes in order to remove any oxide on the target surfaces. The RF power of CdS and ZnS was varied in such a ratio so that Zn x Cd 1-x S was deposited in the desired composition (x=0.17) in working pressure of 16 mTorr. Experimental Procedures EUPVSEC-2015, 14 th to 18 th September 2015 at Hamburg, Germany. As-deposited 3DV.3.13 EDX spectrum of Zn x Cd 1-x S thin films SEM image of Zn x Cd 1-x S thin films XRD spectra of Zn x Cd 1-x S thin films Transmittance and bandgap of Zn x Cd 1-x S thin films for different substrate temperature