Arsine Detection using Chemcassette ® Technology

Honeywell.com  2 History In 1998 ACGIH proposed changing the TLV for AsH 3 from 50 ppb to 2 ppb In 2007 ACGIH changed the TLV for AsH 3 from 50 ppb to 5 ppb Honeywell Analytics has already developed a higher sensitivity and longer lasting Chemcassette ® Study data supported the ability for HA to meet the proposed lower TLV level for AsH 3

Honeywell.com  3 Development The increased sensitivity of the new formulation allowed Honeywell Analytics to achieve better lower detectable limits for all equipment, as shown

Honeywell.com  4 Gas Monitors’ Low Detection Limit Improvement AsH 3 PH 3 SiH 4 B2H6B2H6 MonitorXP Tape Standard Tape XP Tape Standard Tape XP Tape Standard Tape XP Tape Standard Tape Vertex/CM40.3 ppb5 ppb 0.25 ppb0.5 ppb10 ppb15 ppb System ppb7 ppb8 ppb10 ppb0.4 ppb1.33 ppb13 ppb21 ppb SPM0.7 ppb15 ppb20 ppb30 ppb0.25 ppb0.5 ppb10 ppb30 ppb TLD0.7 ppb15 ppb20 ppb30 ppb0.25 ppb0.5 ppb10 ppb30 ppb

Honeywell.com  5 Sensitivity Aging Results Honeywell Analytics also tested for Chemcassette ® sensitivity. Would the formula remain consistent over three months? Day 1Day 14 Day 42 Day 77 Day 122

Honeywell.com  6 Gas Generation Methodology Apparatus A: gas source with 2 certified AsH3 gas cylinders Apparatus B: Kin-Tech gas generation with permeation device Concentrations determined by theoretical calculations, and confirmed by 3 standard methods

Honeywell.com  7 Validation Methods Honeywell verified standard gas concentrations using 3 independent methods –FTIR (64 scans with a 10 m cell) –Analytical method (Visible spectrophotometry based on NIOSH method S332) –Kin-Tech Standard Gas Generator (Permeation Device Method)

Honeywell.com  8 Gas Cylinder Consistency Test

Honeywell.com  9 Signal to Noise Ratio To validate instrument response, Honeywell Analytics did extensive “noise level” studies both in the laboratory and in the field A new LDL (lower detection limit) was determined by finding an acceptable signal to noise ratio Ratio was set at >3:1 signal to noise

Honeywell.com  10 CM4 ® Low Concentration AsH 3 Signal and Noise

Honeywell.com  11 System16 Low Concentration AsH 3 Signal and Noise

Honeywell.com  12 SPM Low Concentration AsH 3 Signal and Noise

Honeywell.com  13 Ambient RH vs. Noise Test Normal RH setting in semiconductor fabs is about 40% Extensive studies were done on noise levels at 5% RH, at 40% RH and at 90% RH versus the signal generated by 0.5 ppb AsH 3 (one tenth of the proposed TLV level) Maximum noise drift caused by shifting RH from 5 to 40% is 10 cts. This is less than 1/10th the signal generated by 0.5 ppb of AsH 3

Honeywell.com  14 CM4 ® Ambient RH Noise vs. 0.5 ppb AsH 3 Signal

Honeywell.com  15 CM4 ® Monitor Accuracy Data CM4 ® Gas Monitor accuracy to low level concentrations was verified against the generated standards Verification results are shown at right Std Gas Conc (ppb) CM4 (ppb)Accuracy % % % % % % % % % % % %

Honeywell.com  16 CM4 ® Low Level Calibration Accuracy Verification I Standard Gas Source: Standard Gas Generator with Certified Gas Cylinder

Honeywell.com  17 CM4 ® Low Level Calibration Accuracy Verification II Test 1Test 2Test 3Test 4Test 5Test 6Test 7Test 8 Oven Temperature (°C) Room RH (%) Gas RH (%)40 Total Output Flow* (ml/min)3273 Cylinder Pressure (psi)50 55 Permeation Oven Temperature (°C) Permeation Rate (nl/min) KT Gas Concentration (ppb) KT-Gas Flow (ml/min) Dilution Air Flow (L/min) Standard Gas Concentration (ppb) CM4 Response (ppb) CM4 Response/Standard Gas (ppb)102.08%107.32%94.16%11.84%114.00%104.98%107.25%103.55% Standard Gas Source: Standard Gas Generator with Permeation Device

Honeywell.com  18 CM4 ® Low Level Calibration Accuracy Verification II Standard Gas Source: Standard Gas Generator with Permeation Device Std Gas Conc (ppb) CM4 (ppb)Accuracy % % % % % % % %

Honeywell.com  19 CM4 ® XP Result Consistency Over Time Before placing an XP CM4 ® at a Beta site, the CM4 ® was tested for consistency over time in laboratory condition

Honeywell.com  20 Beta Testing Data Beta Customer ran sample lines from the test CM4 ® to existing monitoring locations at the tool, also in the fab utility area, and to VMBs located in the sub-fab The CM4 ® was run “in situ” for over three months Data was collected by the Customer and transmitted to Honeywell Analytics

Honeywell.com  21 CM4 ® AsH 3 Low Detection Limit Feasibility Field Study Beta Testing Site A, Test Result I

Honeywell.com  22 CM4 ® AsH 3 Low Detection Limit Feasibility Field Study Beta Testing Site A, Test Result II

Honeywell.com  23 CM4 ® AsH 3 Low Detection Limit Feasibility Field Study Beta Testing Site A, Test Result III

Honeywell.com  24 CM4 ® AsH 3 Low Detection Limit Feasibility Field Study Beta Testing Site A, Test Result IV

Honeywell.com  25 CM4 ® AsH 3 Low Detection Limit Feasibility Field Study Beta Testing Site A, Test Result V

Honeywell.com  26 Conclusion Based on Lab work, proof of methodology, and field trials, Chemcassette Technology can successfully monitor for AsH 3 at the newly established level of 5 ppb without risk of false positives.

Honeywell.com  27 Questions??