Nano-Materials Characterization Yoram Shapira, EE Nano-bio-electronics 18.12.01 Growth and Processing Characterization and Analysis Design and Modeling.

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Presentation transcript:

Nano-Materials Characterization Yoram Shapira, EE Nano-bio-electronics Growth and Processing Characterization and Analysis Design and Modeling Nano Systems

Nano-Materials Characterization

Courtesy Yossi LEREAH Transmission Electron Microscope Electron source: W, LaB6, FEG Condenser Lenses (Electromagnetic) Sample Objective Lens (determine the point resolution) Post Sample Lenses Detector: electron- light converter Chemical analysis: EDS, GIF Wavelength at 200KV nm

Bragg’s Law 2dsin  L Nano-Materials Characterization Courtesy Yossi LEREAH

Objective Lens The Core of TEM Back Focal Plane: Diffraction Pattern Image Plane Diffraction Contrast: Bright Field or Dark Field by excluding one of the beams (in the back focal plane) Phase Contrast by including all beams Courtesy Yossi LEREAH

Crystallization of Ge:Al (1) A branched Morphology in Material Science that is relevant to Life Science Contrast: Mass thickness, Bragg Conditions Diffraction: Polycrystalline, Preferred orientation Yossi LEREAH TEL AVIV University

Yossi LEREAH TEL AVIV University Crystallization of Ge:Al (2) Phase Contrast reveals the periodicity of the atoms. The interface is rough down to atomic scale Courtesy Yossi LEREAH

Melting of Nano-Particles Melting temperature depends on the particle size. Existence of surface melting. Diffraction Contrast between solid and liquid phases Yossi LEREAH TEL AVIV University

Nano-Materials Characterization

Courtesy Yossi LEREAH

Nano-Materials Characterization

Collected signals in SEM Sample Incident beam Secondary electrons (SE) Backscattered electrons (BSE) Cathodoluminescence (CL) X-rays Absorbed current Courtesy Z. Barkay

Energy distribution of SE and BSE Courtesy Z. Barkay

Signal emission from interaction volume Rp Courtesy Z. Barkay

The origin of high SE spatial resolution High resolution SE(1): 1 nm Lower resolution SE(2):  m Courtesy Z. Barkay

Composition dependence  keV Usually  at 30KeV  z) Courtesy Z. Barkay

Basic SEM modes of operation - summary (*) usually sizes of 1cm, dependent on SEM configuration (**) voltage and Z dependent Additional modes: Voltage contrast (VC) and EBIC - usually used in devices and p-n junctions. Courtesy Z. Barkay

AntHuman hairEye of an ant Courtesy A. Merson

Nano-Materials Characterization

Surface, Atomic number, Element imaging BS E Cu SE Courtesy Z. Barkay

Nano-Materials Characterization Courtesy Z. Barkay

Nano-Materials Characterization Courtesy Z. Barkay

Nano-Materials Characterization

Atomic mapping and analysis Cl Br r Ag r Courtesy Z. Barkay

Nano-Materials Characterization Courtesy CEA

Nano-Materials Characterization

Auger process Courtesy A. Merson

Auger Emission a. X-ray fluorescence b. Auger emission Courtesy A. Merson

Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization

Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization

Courtesy A. Merson

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization Courtesy PHI

Nano-Materials Characterization

Courtesy A. Merson I~exp(-2kd)

Courtesy A. Merson

Non-contact mode Courtesy A. Merson

Nano-Materials Characterization Courtesy Y. Rosenwaks

Nano-Materials Characterization

Materials Characterization Courtesy Dr. Z. Barkai

Nano-Materials Characterization STM: Si(7x7)

Nano-Materials Characterization A superlattice of alternating GaSb (12 ml) and InAs (14 ml) was MBE grown by W. Barvosa-Carter, B. R. Bennett, and L. J. Whitman. Only every-other lattice plane [Sb (reddish) and As (blueish)] is exposed on the (110) surface.

Materials Characterization

Iron (on Cu) “Coral”

Nano-Materials Characterization Courtesy Z. Barkay

Nano-Materials Characterization Courtesy Z. Barkay

Courtesy Y. Rosenwaks

Materials Characterization Courtesy Y. Rosenwaks

Nano-Materials Characterization Courtesy Dr. S. Richter

Materials Characterization Courtesy Dr. S. Richter

Materials Characterization Courtesy Dr. S. Richter

Materials Characterization Courtesy Dr. S. Richter

Thank you for your attention Yoram Shapira Nano-Materials Characterization