NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology Scanning electron microscope(SEM)- 掃描 式電子顯微鏡 Adviser : KUN-SIAN WU Reporter: CHIN-TUNG CHU 2013/12/24

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 2 Outline 1.Introduction 2.Principle & Structure 3.Application 4.Comparison 5.Conclusion 6.References

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 3 Introduction

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 4

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 5 Introduction 圖片來源 : 南台科技大學 FE-SEM 實驗室

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 6 Introduction Sir Joseph Thomson Ernst Ruska Max Knoll Manfred von Ardenne (Zworykin)

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology Structure 7

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology Structure Vacuum system( 真空系統 ) Mechanical pump( 機械泵 ) 、 Oil diffusion pump( 油擴散泵 ) 、 Turbo molecular pumps( 渦輪 分子泵 ). Electron beam system( 電子束系統 ) 1.Electron beam gun( 電子槍 )- Field emission( 場發射 ) 、 Wolfram( 鎢 ) 、 Lanthanum exaboride( 六硼化鑭 ). 2.Electromagnetic lens( 電磁透鏡 ) Imaging system( 成像系統 ) Secondary electron( 次級電子 ) 、 Back-scattered electron wireless( 背散無線電子 ) 、 Auger electron( 歐傑電子 ) 、 X-ray 8

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology Structure 9 圖片來源 : 南台科技大學 FE-SEM 及奈米材料及電子實驗室

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 10 Principle

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 11 Principle Imaging in CRT/LCD Electron beam gun Bunching mirror system Sample X-ray and electorn Electron beam gun (high voltage) The first Bunching mirror The Second Bunching mirror X-ray detectors Sample room Vacuum pump system (diffusion or Turbo molecular) Objective Electronic control and imaging system : 1.Reflection electron 、 Secondary electron 、 Sample current Amplifier 2.Selector Switch 、 Video enlarge 、 CRT 、 camera 3.Zoom controller 、 Scan generator

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 12 Application

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 13 Application 圖片來源 : 南台科技大學 奈米材料及電子實驗室

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 14 Comparison

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 15 Comparison 1.SEM: reflected by the incident electron. 電子束經樣品反射 2.AFM: Van Der Waals Force 原子間的凡得瓦力 1.Measurement needs in vacuum. 需要在真空中量測 2.Samples must be conductive. 樣品須為導電材質 3.Need gold, platinum if the material is not conductive. 若材料不導電，需鍍上金或白金 4.Samples can not be a powder or a volatile items. 樣品不能是粉末或揮發性物品 圖片來源 : 南台科技大學 奈米材料及電子實驗室

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology Conclusion 掃描式電子顯微鏡 (SEM) 雖然有真空下測量、樣品需導電及樣品不能 為粉末等缺點，但其電子槍壽命可使用許久，相較於原子力顯微鏡 (AFM) 的探針，確實是有優勢，而且樣品準備上也很簡單，在科學研 究上還是有一定的地位存在。 16

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology References 1. 維基百科， SEM 、 AFM 2. 南台科技大學, 碩士論文, 莊凱揚 3. 南台科技大學, 碩士論文, 許宏全 4. 南台科技大學,FE-SEM 實驗室, 奈米材料及電子研究室 5.SEM 可使用地點 : 南台科技大學、成功大學、國家奈米實驗室、中山 大學 17

NEM Lab. NEM Lab. Nano Electronic material Lab. Southern Taiwan University of science and technology 18 Thanks for your attention !