Pt/PNZT/Pt Data using Precision Premier Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. Radiant Technologies,

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Presentation transcript:

Pt/PNZT/Pt Data using Precision Premier Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. Radiant Technologies, Inc. August 7, 2001

Pt/PNZT/Pt Data using Precision Premier Sample Description Capacitor Area:12µ x 12µ Construction: Pt/PNZT/Pt Composition:4/20/80 PNbZT PNZT Thickness:1µm

Pt/PNZT/Pt Data using Precision Premier Displacement at 40V Displacement measured at 40Vwith a measurement period of 1 second.

Pt/PNZT/Pt Data using Precision Premier Displacement at 40V Displacement loop averaged 10 times.

Pt/PNZT/Pt Data using Precision Premier Nested Displacement Loops Displacement measured at 40V, 30V, 20V, and 10V. Measurement period is 1 second.

Pt/PNZT/Pt Data using Precision Premier Conclusion Precision Premier integrates with the Seiko Instruments AFM family to collect displacement measurements of thin ferroelectric films. The 1µm thick Radiant 4/20/80 PNbZT film displaced 23Å at 40V giving the film a d 33 value of The measured value is the not the true d 33 value of the film due to strong clamping by the substrate. Piezoelectric fatigue, frequency response, and imprint can also be measured using the Vision software.