U T JOHN G. EKERDT RESEARCH FOCUS We study surface and materials chemistry as it relates to the growth and properties of ultrathin metal, dielectric and.

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Presentation transcript:

U T JOHN G. EKERDT RESEARCH FOCUS We study surface and materials chemistry as it relates to the growth and properties of ultrathin metal, dielectric and ferroelectric films for optical and electronic applications, and we study the catalytic conversion of lignin to chemicals. We seek to understand and describe nucleation and growth of films and nanostructures, structure-property relationships, and site-specific reactions.

U T Current Group/Collaborators Topical AreaStudentsCollaborators Thin Films (Metals, Dielectrics, Polymers, Ferroelectrics) Dan Bost, Tyler Elko- Hansen, Brad Leonhardt, Martin McDaniel, Tuo Wang A. Demkov (Physics), Dina Triyoso (Global Foundries) Nanostructures (Si, Ge, Metal, Polymer, Ferroelectrics) Brad Leonhardt, Joe McCrate B. A. Korgel, D. P. Neikirk (ECE) Biomass Conversion (Lignin) Blair Cox, Thong Ngo Funding: AEC, Intel Corp., NSF, ONR, Welch

U T JOHN G. EKERDT ProjectsSubject Areas Fundamental Aspects Technology Applications Ultra Thin Metal and Metal Alloy Films Si/Ge Nanostructures Chemistry of Dielectric Surfaces Epitaxial Growth of Ferroelectrics CVD Polymer Films Biomass Catalysis Surface Science Materials Science Nanotechnology Materials Chemistry Reaction Kinetics Catalytic Chemistry Atomic Layer Deposition Chemical Vapor Deposition Molecular Beam Epitaxy Self-Assembly Chemical nature of surface defects that serve as activation sites and nucleation sites Enabling chemistry for film growth or nanoparticle growth Nature of bonding across interfaces Role of alloying and doping in phase stability Relations between bonding, structure and properties Catalysis in ionic liquids Advanced Memory Devices Sensors Diffusion Barriers for 45 and 32 nm Technology Nodes Dielectrics for Nanowire Devices Monolithic Integration of Ferroelectrics/Si/ Compound Semiconductors Efficient Biomass Conversion Processes

U T ALD growth of high-k dielectric and expitaxial oxides Primary Goal: Stabilize the amorphous phase of HfO 2 ; [4Hf+1La]×32 Atomic Layer Deposition (ALD) of amorphous high-k dielectric Molecular Beam Epitaxy (MBE) system Amorphizing elements (La, Al, Ta, etc.) can be incorporated into HfO 2 to increase the film crystallization temperature The distribution of the amorphizer also affects film crystallization temperature ALD system (to be connected with the MBE) Customized ALD chamber, ensuring in situ sample transfer and high efficiency deposition Anatase TiO 2 SrTiO 3 Cross-sectional TEM of TiO 2 on SrTiO 3 Grow expitaxial oxides on epi-surfaces prepared by MBE ALD XPS/ UPS STM LaCoO 3 on SrTiO 3 -buffered Si grown using MBE with atomic oxygen Strain from SrTiO 3 induces a ferromagnetic state in LaCoO 3 that can possibly be exploited for novel devices Photocatalyst TiO 2 on SrTiO 3 -buffered Si Large changes in bond lengths and angles due to strain

U T Ultrathin Continuous Metal Films Primary Goal: Examine the nucleation, deposition, and material properties of thin metal films, with a focus on the control of composition and nucleation. Poor nucleation: Good nucleation : Increased B 2 D 6 exposure leads to trap sites that increases the number of particles forming on HOPG Nucleation Promotion: Control of the nucleation behavior of Pt on HOPG is achieved through the use of Boron implantation to create defect sites, altering the number of nuclei formed and the final structure of the material. Validate the predictions for Ru and Co films using P and B grown from the hydrides PH 3 and B 2 H 6, and determine how properties scale with thickness Amorphous Ru(P) Model HOPG Annealed 6L

U T Defect Site Stable Cluster Stable cluster at defect site Nanoparticle nucleation on oxides Primary Goal: Determine the chemical nature of native and synthesized defects on oxides and use this knowledge to control particle nucleation on these materials. Defect mediated nucleation: Particle density can be controlled by creating surface defects that can act as traps for adatoms. Defect concentration is controlled on SiO 2 by etching with Si. Ge particle density can be enhanced by an order of magnitude with this method. PL spectra from compounds deposited on silica after heating to ~525 K for the perylene dosed sample and ~ 750 K for the 3-vinyl perylene dosed sample. Left: Plot of areal density versus Si dose showing influence of etching on density. Below: SEM images of Ge particles on SiO 2 exposed to no (b) and 1.0 ML (f) Si etching. Defect chemistry and structure: Fluorescent molecules with specific functional groups (vectors) bind to defect sites on these materials. Photoluminescence (PL) spectra can then provide direct information about the types and density of defects. Schematic of nucleation processes on surfaces with defect sites that are capable of trapping adatoms. Smaller clusters are stable at trap sites, increasing the total nuclei density.

U T Biomass Processing in Ionic Liquids Primary Goal: Develop methods for separation, depolymerization, and hydro- deoxygenation of lignin for use as a fuel or aromatic feedstock in ionic liquids Acid catalyzed depolymerization Biomass Cellulose/ hemicellulose Lignin Fuel, Chemicals Ionic liquids Can dissolve biomass Tuneable properties No vapor pressure Can act as solvent/catalysts Up to 82.5% yield Anion influences reaction mechanism Acidity of ionic liquids measured Hydrodeoxygenation Phenylalkanes Lignin fragments Remove heteroatomes while maintaining aromatic character Testing various catalysts and conditions is the next step in the project ■ Conversion □Yield

U T iCVD Deposition of Conformal Polymer Primary Goal: Utilize iCVD deposition techniques to create a nanoscale, conformal polymer coating as a responsive surface layer in a small RFID sensor Nanowire mats have very high surface area to volume ratios, ideal for a sensor substrate iCVD deposition allows conformal coating even in deep wells and sub-micron gaps ++ Interdigitated Circuit (from collaborator: Neikirk, UT) Ge Nanowire Paper (from collaborator: Korgel, UT) Initiated Vapor Phase Polymerization The iCVD Reactor Interdigitated pattern allows very high capacitance sensors Monomer (Vinyl Pyridine) Crosslinker (Divinylbenzene) Initiator (di-tert-butyl peroxide) Complete Sensor (coated nanowires atop circuit) The coating type will determine sensitivity of the sensor: Aromatic: polystyrene Straight-chain oil: polyethylene Salinity: polyacrylate pH: polymethacrylic acid Ferrite “core”