Mechanisms of ultra-smoothing induced by ion beam erosion Randall L. Headrick, University of Vermont, DMR-0348354 Ion erosion of solid surfaces is known.

Slides:



Advertisements
Similar presentations
Display Systems and photosensors (Part 2)
Advertisements

Modulation of conductive property in VO 2 nano-wires through an air gap-mediated electric field Tsubasa Sasaki (Tanaka-lab) 2013/10/30.
SEM & TEM in Polymer Characterization
Structure of a Pentacene Monolayer Deposited on SiO 2 : Role of Trapped Interfacial Water Significance Organic semiconductors have potential applications.
Semiconductor manufacturing requires that wafers be exposed to a plasma for more than 1/3 of the manufacturing steps—including etching, deposition, ashing,
Nanowire Presentation Alexandra Ford 4/9/08 NSE 203/EE 235.
THE WAFER- FOCUS RING GAP*
Metal-insulator thin films have been studied for making self-patterning nano-templates and for controlling attachment strength on template surfaces. These.
Study of magnetic helicity in solar active regions: For a better understanding of solar flares Sung-Hong Park Center for Solar-Terrestrial Research New.
CMP Seminar MSU 10/18/ What makes Surface Science “surface” science ? R. J. Smith Physics Department, Montana State Univ. Work supported by NSF.

Physical Vapor Deposition
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #5.
Thin Film Deposition Prof. Dr. Ir. Djoko Hartanto MSc
Quantum Electronic Effects on Growth and Structure of Thin Films P. Czoschke, Hawoong Hong, L. Basile, C.-M. Wei, M. Y. Chou, M. Holt, Z. Wu, H. Chen and.
Scanning Electron Microscopy
Comparison of Field Emission Behaviors of Graphite, Vitreous Carbon and Diamond Powders S. H. Lee, K. R. Lee, K. Y. Eun Thin Film Technology Research Center,
National Science Foundation Material for Future Low-Power Electronics Daniel Gall, Rensselaer Polytechnic Institute, DMR Outcome: Researchers at.
PREPARATION OF ZnO NANOWIRES BY ELECTROCHEMICAL DEPOSITION
Overview of course Capabilities of photonic crystals Applications MW 3:10 - 4:25 PMFeatheringill 300 Professor Sharon Weiss.
NANOMETER SCALE LITHOGRAPHY DANIEL BERNARD – BENJAMEN STROBELAPRIL 29, 2013 EE 4611 – STANLEY G. BURNS NANOMETER SCALE LITHOGRAPHY, ALSO KNOWN AS NANOLITHOGRAPHY,
Identifying the Dominant Interstitial Complex in GaAsN Alloys The concentration and local atomic environment of solute atoms determine the electronic properties.
NSF GOALI Interactions of Plasma/Energetic Beams with Organic Masking Materials Gottlieb S. Oehrlein, University of Maryland College Park, DMR
Influence of Point Defects on the Properties of Highly Mismatched Alloys Rachel Goldman, University of Michigan Ann Arbor, DMR It has been suggested.
Novel Real Time Optics for Thin Film Materials Research - I Robert W. Collins The Pennsylvania State University, DMR New optical spectroscopies.
Corresponding author: Special thanks to Dr. I. Vavra for TEM analyses Influence of spatial sputterig.
AlGaN/InGaN Photocathodes D.J. Leopold and J.H. Buckley Washington University St. Louis, Missouri, U.S.A. Large Area Picosecond Photodetector Development.
High K Films: Organic Field Effect Transistors Using Self Assembled Barium Titanate Nanoparticles Stephen P. O’Brien, Columbia University, DMR
Center for Materials for Information Technology an NSF Materials Science and Engineering Center Nanolithography Lecture 15 G.J. Mankey
Technology Thin films ZnO:Al were prepared by RF diode sputtering from ZnO + 2wt % Al 2 O 3 target. It is a plasma assisted deposition method which involves.
Nanoscale Self-Organization of Metallic Alloys under Ion Irradiation Robert Averback and Pascal Bellon, University of Illinois, MET DMR Award#
K.R. Roos, F. Meyer zu Heringdorf, et al. J. Phys: Cond. Mat. 17 (2005) S1407 Diffusion Made Visible DMR James H. Craig, Jr. Kelly R. Roos The.
The deposition of amorphous indium zinc oxide (IZO) thin films on glass substrates with n-type carrier concentrations between and 3x10 20 cm -3 by.
Sputter deposition.
Electronic Properties of Thin Film Organic Superconductors studied using Synchrotron Radiation-based Soft X-Ray Spectroscopies Kevin E. Smith, Boston University,
Self-assembly Nanostructure and Lithography
Introduction P. Chelvanathan 1, Y. Yusoff 2, M. I. Hossain 1, M. Akhtaruzzaman 1, M. M. Alam 3, Z. A. AlOthman 3, K. Sopian 1, N. Amin 1,2,3 1 Solar Energy.
Ferroelectric Nanolithography Extended to Flexible Substrates Dawn A. Bonnell, University of Pennsylvania, DMR Recent advances in materials synthesis.
Center for Materials for Information Technology an NSF Materials Science and Engineering Center Substrate Preparation Techniques Lecture 7 G.J. Mankey.
Control of Carbon Nanotube Nucleation Rate with a Hydrogen Beam Plasma Paolo Santos 1, Dorothée Alsentzer 3, Thomas B. Clegg 2,3, Sergio Lemaitre 2,3,
Quantum Beating Patterns in the Surface Energy of Pb Film Nanostructures Peter Czoschke, Hawoong Hong, Leonardo Basile and Tai-Chang Chiang Frederick Seitz.
Molecular Dynamics Study of Ballistic Rearrangement of Surface Atoms During Ion Bombardment on Pd(001) Surface Sang-Pil Kim and Kwang-Ryeol Lee Computational.
In situ X-ray Diffraction Study of High Performance Organic Semiconductor Polymorphism Zhenan Bao, Stanford University, DMR Flexible, transparent.
1 Date: Speaker: G. Magesh Visible light photocatalytic activity of PbSe nanocrystal/TiOx films Reference: C. Wang, K. Kwon, M. L. Odlyzko, B.
Plan for Today (AP Physics 2) Ch 24, 27, and 28 Review Day More Review Materials.
 “ dark –axis” 10g/l ob-H 2 Pc Pen Writing A P Au (Electrode) CuPc (Electron Donor) PTCDA (Electron Acceptor) ZnO (Hole Blocking Layer) ITO (Transparent.
High Resolution Depth Profiling of Ti Oxidation
분자동역학을 이용한 금속표면의 Kinetic Roughening 현상에 대한 재 증착 효과 연구 Sang-Pil Kim 1,2, Kwang-Ryeol Lee 1, Jae-Sung Kim 3 and Yong-Chae Chung 2 1.Computational Science.
IV. Results and Discussion Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films Ai-Ying Wang 1, Kwang-Ryeol.
Split-gate Organic Field Effect Transistors: Control over Charge Transport Alan J. Heeger, University of California-Santa Barbara, DMR Photo of.
Korea Institute of Science and Technology Seung-Hyeob Lee, Churl-Seung Lee, Seung-Cheol Lee, Kyu-Hwan Lee, and Kwang-Ryeol Lee Future Technology Research.
Phase Field Microelasticity (PFM) theory and model is developed for most general problem of elasticity of arbitrary anisotropic, structurally and elastically.
The Light Emitting Field Effect transistor (LEFET) as the route to injection lasers fabricated from luminescent semiconducting polymers Alan J. Heeger,
Summer '07 at CLS Small Angle X-Ray Scattering Peter ChenChithra Karunakaran & Konstantine Kaznatcheev.
Farzana R. ZakiCSE 177/ EEE 1771 Lecture – 19. Farzana R. ZakiCSE 177/ EEE 1772 MOSFET Construction & operation of Depletion type MOSFET Plotting transfer.
Conclusions References 1. A. Galimberti et al., Nucl. Instrum. Meth. A 477, (2002). 2. F. Capotondi et al., Thin Solid Films 484, (2005).
Effect of sputter-particle flux variations on properties of ZnO:Al thin films S. Flickyngerova 1, M. Netrvalova 2,L. Prusakova 2, I. Novotny 1, P.Sutta.
ALD coating of porous materials and powders
LIGHT BACKSCATTERING ANALYSIS of Textured Silicon SAMPLES
© 1997, Angus Rockett Section I Evaporation.
Luminescent Periodic Microstructures for Medical Applications
6.3.3 Short Channel Effects When the channel length is small (less than 1m), high field effect must be considered. For Si, a better approximation of field-dependent.
Centro de Investigación y de Estudios Avanzados del Institúto Politécnico Nacional (Cinvestav IPN) Palladium Nanoparticles Formation in Si Substrates from.
PVD & CVD Process Mr. Sonaji V. Gayakwad Asst. professor
PP-25 Rearrangement Effect of Surface Atoms on the Alternation of Patterning Regime: Incident Energy Effect of Ar Haeri Kim1,2, Sang-Pil Kim1, and Kwang-Ryeol.
Characterization of Thin Films
SILICON MICROMACHINING
IC AND NEMS/MEMS PROCESSES
Shukui Zhang, Matt Poelker, Marcy Stutzman
Ion Beam Analysis (IBA)
Presentation transcript:

Mechanisms of ultra-smoothing induced by ion beam erosion Randall L. Headrick, University of Vermont, DMR Ion erosion of solid surfaces is known to produce a variety of surface morphologies, such as self-organized patterns composed of highly correlated arrays of dots or ripples. One effect of considerable practical importance is that of surface smoothing of nanometer features during etching or film deposition using energetic species. We have investigated pattern formation and smoothing during Ar + ion erosion of Al 2 O 3 and SiO 2 surfaces. X-ray scattering experiments show that ion smoothing of a patterned surface is explained by a mechanism where collisions with near- surface atoms produce an effective downhill current. The results lead to predictions for the surface morphology phase diagram as a function of ion energy and incidence angle that substantially agree with experimental results. H. Zhou, Y. P. Wang, L. Zhou and R. Headrick et al. Physical Review B 75, (2007) H. Zhou, L. Zhou, G. Özaydin, K. F. Ludwig Jr. and R. Headrick (submitted to Physical Review Letters) Surface morphology evolution of an initially rough surface during ion beam smoothing is investigated by real-time synchrotron x-ray scattering. An ion-collision induced downhill surface current causes rapid smoothing of nanometer scale features. h (x,t) j (x)

Surface Roughness Evolution During the Sputter Deposition of WSi 2 Amorphous Films Randall L. Headrick, University of Vermont, DMR Sputter deposition is a widely-used process for making thin films for an enormous range of applications. However, the detailed mechanisms of roughening and smoothing in the growth processes are not known. In this work, real-time x-ray scattering methods are employed to quantitatively investigate the surface evolution of sputter- deposited WSi 2 amorphous films. The surface morphology changes from ultra-smooth to rough as the Ar background pressure in the vacuum chamber is varied. At low pressures, energetic particles can bombard the surfaces and promote smoothing, while at higher pressures the surfaces roughen rapidly. Corresponding changes in x-ray intensity profiles as a function of pressure and film thickness are used to monitor these effects. The experiments are carried out at X21-beamline at NSLS. Sketch of the real-time x-ray scattering method to study the surface morphology evolution during thin film growth by sputter deposition. The scattering pattern evolves as the film thickness and roughness spectrum change during deposition. Intensity profile evolution Surface evolution

Structure and Carrier Mobility of Solution-Deposited Thin Film Transistors Randall L. Headrick, University of Vermont, DMR TIPS-pentacene lines are deposited over gold source and drain contacts using a 1.0 mm pen, as shown in the inset. A polarization mode optical micrograph shows crystalline grains bridging across the 75  m transistor channel. The scale bar represents 250  m. New solution processing methods for deposition of organic semiconductor films are currently needed in order to drive research and technology in organic electronics. Direct write methods have the potential to produce large grain size films with improved electrical carrier mobility. A direct-write process using a hollow pen has been found to be effective in depositing films in narrow lines with very large grain sizes. The method has been applied to the production of Organic Field Effect Transistors (OFETs) with control of crystalline grain size, grain orientation, and field-effect carrier mobility. Transistor Channel R. Headrick, S. Wo, F. Sansoz, and J.E. Anthony (submitted to Applied Physics Letters)

Headrick’s group at UVM worked with a team from Stowe H.S. (Stowe, VT) during the academic year on a project to study the fabrication and light output of Organic Light Emitting Diodes (OLEDs) based on polymer materials. One teacher and two students spent a week at Headrick’s lab at UVM during the month of June 2006 learning about the science and technology of OLEDs. The materials and equipment for the project were then taken to Stowe H.S., where the project was continued throughout the academic year. The team developed their own film deposition and encapsulation methods, and showed that these improvements reduced the degradation rate of the diodes. Both students started college in the Fall of 2007, and both plan to major in a science. Organic Light Emitting Diodes: a High School Outreach Project Randall L. Headrick, University of Vermont, DMR Simple OLEDs are fabricated in several steps. Light is emitted from regions where the back contacts are attached when a small voltage is applied, and is readily visible with the room lights dimmed.