FUJIFILM Electronic Materials Confidential and Proprietary Information FUJIFILM ELECTRONIC MATERIALS Page 1 FUJIFILM Electronic Materials Company Overview.

Slides:



Advertisements
Similar presentations
VOC Emissions Reduction from Photolithographic Processes
Advertisements

Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus.
CMOS Fabrication EMT 251.
Adhesive bonding Ville Liimatainen Contents Introduction – Adhesive bonding – Process overview – Main features Polymer adhesives Adhesive.
MetalMUMPs Process Flow
Micromirror Lithography David Chen EECS 277. Overview What is Lithography? What are Micromirrors? Successful Research Future.
Photolithography. Outline Motivation History  Photolithography Methods and Theories  Preparation and Priming  Spin-Coating  Photoresists  Soft-baking.
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #6.
High-K Dielectrics The Future of Silicon Transistors
A Primer on CMOS Technology. Objectives: 1.To Introduce about CMOS technology.
Lecture 1.0 Computer Basics What is in a computer?
Hello from Mike Deal at Stanford University - Senior Research Scientist at the Stanford Nanofabrication Facility V5.15.
Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator.
Prof. John Nestor ECE Department Lafayette College Easton, Pennsylvania ECE VLSI Circuit Design Lecture 2 - CMOS Processing.
Electrochemical Aspects of Copper Chemical Mechanical Planarization (CMP) Esta Abelev, D. Starosvetsky and Y. Ein-Eli. Introduction: Copper is used as.
Design and Implementation of VLSI Systems (EN0160) Sherief Reda Division of Engineering, Brown University Spring 2007 [sources: Sedra/Prentice Hall, Saint/McGrawHill,
Photopolymers and Photoresists for Electronic
ACTFEL Alternating Current Thin Film Electroluminescent Lamps.
ECE 424 – Introduction to VLSI Design Emre Yengel Department of Electrical and Communication Engineering Fall 2012.
EE141 © Digital Integrated Circuits 2nd Manufacturing 1 Manufacturing Process I Dr. Shiyan Hu Office: EERC 518 Adapted and modified from Digital Integrated.
Lecture 10.0 Photoresists/Coating/Lithography. Semiconductor Fab Land$0.05 Billion Building$0.15 Billion Tools & Equipment $1 Billion Air/Gas Handling.
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #7. Etching  Introduction  Etching  Wet Etching  Dry Etching  Plasma Etching  Wet vs. Dry Etching  Physical.
J. Salonen, “Flip Chip Bumping Process at VTT" [presentation for GPG], 16-March-2007 Flip Chip/Bumping Process at VTT Last modified March 16, 2007 By Jaakko.
Lithographic Processes
Micro-fabrication.
CS/EE 6710 CMOS Processing. N-type Transistor + - i electrons Vds +Vgs S G D.
1 Response Sheet Questions  Why do we need to know the shapes of big molecules? What exactly would it tell you? How is this related to the side effects.
Fabrication of Active Matrix (STEM) Detectors
PCB manufacturing PCBpro.com.
Introduction Chemical mechanical polishing (CMP) is a widely used technique for the planarization of metal and dielectric films to accomplish multilevel.
Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Add nitride.
Manufacturing Process
Page 1 NSF STC Polymers Used in Microelectronics and MEMs An Introduction to Lithography.
Semiconductor Manufacturing Technology Michael Quirk & Julian Serda © October 2001 by Prentice Hall Chapter 9 IC Fabrication Process Overview.
Virtual NanoFab A Silicon NanoFabrication Trainer
Feb 2007Stith1 Semiconductors Material, Components, and Manufacture Joseph Stith February 2007.
EE141 © Digital Integrated Circuits 2nd Manufacturing 1 Manufacturing Process Dr. Shiyan Hu Office: EERC 731 Adapted and modified from Digital Integrated.
1 CHM 585/490 Chapter 19 Semiconductors. 2 The market for imaging chemicals – photoresists, developers, strippers, and etchants – for the combined semiconductor.
Introduction to Wafer fabrication Process
Microcontact Printing
Lithography. MAIN TYPES OF LITHOGRAPHY: * Photolithography * Electron beam lithography –X-ray lithography –Focused ion beam lithography –Neutral atomic.
By: Joaquin Gabriels November 24 th,  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
NanoFab Trainer Nick Reeder June 28, 2012.
GEM foil and Simulation work at CIAE Xiaomei Li Shouyang Hu, Jing Zhou, Chao Shan, Siyu Jian and Shuhua Zhou Science and Technology Science and Technology.
Introduction EE1411 Manufacturing Process. EE1412 What is a Semiconductor? Low resistivity => “conductor” High resistivity => “insulator” Intermediate.
EMT362: Microelectronic Fabrication Interlevel Dielectric Technology
IC Processing. Initial Steps: Forming an active region Si 3 N 4 is etched away using an F-plasma: Si3dN4 + 12F → 3SiF 4 + 2N 2 Or removed in hot.
3M Touch Systems © 3M All Rights Reserved. 3M CONFIDENTIAL Company Overview Date.
SU-8 is a polymer EPON SU-8
Fundamentals of Semiconductor Physics 万 歆 Zhejiang Institute of Modern Physics Fall 2006.
Electronic Protection
EE141 © Digital Integrated Circuits 2nd Manufacturing 1 Digital Integrated Circuits A Design Perspective Manufacturing Process Jan M. Rabaey Anantha Chandrakasan.
Fab - Step 1 Take SOI Wafer Top view Side view Si substrate SiO2 – 2 um Si confidential.
Global Thin-film Semiconductor Deposition Market WEBSITE Single User License: US$ 2500 No of Pages: 53 Corporate User.
HEM OVERVIEW. Honeywell Confidential - © 2015 by Honeywell International Inc. All rights reserved. Honeywell Aerospace Automation and Control Solutions.
 A PCB is printed circuit board, also known as a printed wiring board. It is used in electronics to build electronic devices. A PCB serves 2 purposes.
Antenna Project in Cameron clean room Wafer preparation, conductor deposition, photolithography.
Workshop How to make a PCB
CMOS Fabrication EMT 251.
Tensky International Co.,Ltd. Founded : March.2007 Factory Area : m 2 Address : No.1,Lane 137,Sec 3,Jhongshan RD,Hukou Township,Hsinchu County 303,Taiwan(R.O.C)Office:No.135,
GLOBAL SOLAR INGOT WAFER MARKET Industry Analysis, Size, Share, Growth, Trends, and Forecast
© 2016 Global Market Insights, Inc. USA. All Rights Reserved Global High-k and ALD/CVD Metal Precursor Market to grow at 7.8% CAGR from.
Plasma Ruggedized Solutions Proprietary & Confidential
Manufacturing Process I
MEMS, Fabrication Cody Laudenbach.
Digital Integrated Circuits A Design Perspective
Manufacturing Process I
Beneq: New Modular Product Designs
Manufacturing Process I
Photolithography.
Presentation transcript:

FUJIFILM Electronic Materials Confidential and Proprietary Information FUJIFILM ELECTRONIC MATERIALS Page 1 FUJIFILM Electronic Materials Company Overview Advanced Photoresist ArF, KrF - dry/immersion, SLR/BLR, NTI, e-beam, EUV Core Photoresist g-line, i-line, negative Color Photoresist Resist and ancillaries for image sensor applications Photosensitive Polyimide Negative and positive tone – solvent and aqueous developable materials for buffer coat and ILD applications Dielectric Materials and Delivery Systems Thin film precursors for low-k and high-k applications Formulated Products Mixed-acids, strippers, cleaners, developers, edge-bead removers, custom blends FUJIFILM Planar Solutions – CMP Slurries Slurries for the copper process engineered for customer specific applications Strategic Business Units FUJIFILM ELECTRONIC MATERIALS

FUJIFILM Electronic Materials Confidential and Proprietary Information FUJIFILM ELECTRONIC MATERIALS Page 2 FUJIFILM Electronic Materials Company Overview Global Manufacturing Infrastructure Shizuoka, Japan Rhode Island, USA Arizona, USA Zwijndrecht, Belgium Hsinchu, Taiwan Suzhou, China Developers Resist Edge-bead Removers Photoresists Polyimides Acids / Blends Strippers Thin Films Color Mosaics FUJIFILM ELECTRONIC MATERIALS Negative Resist

FUJIFILM Electronic Materials Confidential and Proprietary Information FUJIFILM ELECTRONIC MATERIALS Page 3 FUJIFILM Electronic Materials Company Overview Chip Silicon Wafer Prepare Pattern and Etch Remove Deposit layer Modify Electrical Properties Dice CMP Post CMP Cleaners Photoresists Edge Bead Removers Developers Cleaners Strippers Dielectrics Low K Barriers Delivery Equipment Photosensitive Polyimides Post CMP Cleaners Protective Coating Photoresists Formulated Products Formulated Products Thin Film Systems Aqueous and Solvent Based Buffer Coat Materials Broad Product Offering Across Semiconductor Manufacturing Chain FUJIFILM ELECTRONIC MATERIALS