Kyoto camera upgrade H. Hayano, 02242009 (Y. Iwashita, K. Watanabe, Y. Kikuchi)

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Presentation transcript:

Kyoto camera upgrade H. Hayano, (Y. Iwashita, K. Watanabe, Y. Kikuchi)

Introduction of camera-cylinder rotation mechanism for cavity inspection with EP-VT support jigs, and for jacketed cavity. motor rotary encoder rotation limiter bearing

Upgrade under fabrication (1)CCD camera upgrade from 5µm CCD pixel to 2.2µm CCD pixel camera. (2) Lens upgrade more magnification with more larger aperture. (3) illumination upgrade EL panel has limited life with more high voltage (for more brightness). -> LED + light guide with scattered surface (twice more light). ~7µm/pixel  targeting 3.5 µm/pixel

Image capture automation (1)control of cavity position being done by VB application. (2) Image capture and automated file-save already done by VB application. (speed is enough fast, but must wait for vibration damping) (automated focus is the next concern) (3) defect pattern matching the software already fabricated in 2007 was tested using recent high quality pictures. -> no good results, so far. (match to every bright traces, not suspected defects only)

Use for cavity fabrication (1)EBW evaluation at dumbbell stage (for MHI-07, 08, 09) small pits were found at around equator region before EBW. (maybe they appeared after pressing) scratches were found on EBW seam in dumbbell caused by EBW clamp jig screws dismounting. (We fed back to fabrication line people.) (2) …..