Overview of LBNL’s High-Tech Buildings Project Activities Bill Tschudi and Tim Xu April 21, 2004

Diverse Support  California Energy Commission  Labs 21  New York State Energy Research and Development Authority (NYSERDA)  Northwest Energy Efficiency Alliance (NEEA)  Public Utilities  California Institute for Energy Efficiency (CIEE)  Industrial Technology Research Institute (ITRI)  Montana State University

Industry Collaborations  ASHRAE (lab, cleanroom, data center TC’s)  IEST (minienvironment, fan-filter units)  Air Movement and Control Association (AMCA)  Silicon Valley Manufacturers Group  7X24 Exchange Organization  Uptime Institute  ITRI (Industrial Technology Research Institute, Taiwan)  Sematech

Research Collaborations  University of California UC Merced Campus  Cornell University Demand Controlled Filtration  Georgia Tech CEETHERM  State University of New York Data Center Air Management  Industrial Technology Research Institute Energy Benchmarking Fan-Filter Unit testing

Energy Intensive High-tech Buildings Cleanrooms Data Centers Laboratories

Energy Benchmarking  Enables comparison to other similar facilities  Establishes baseline to track performance over time  Prioritizes where to apply energy efficiency improvement resources  Identify better performing systems  Identify maintenance and operational problems  Leads to operational cost savings

Some Results: Energy End Use in Cleanrooms

Air Recirculation Comparison

Air-change Benchmarks

Make-up Air System Comparison

Chilled Water Systems

UPS Efficiency

Benchmarking vision  On-line benchmark results that anyone can access for comparison.  We’d like to incorporate benchmark data that others have.  Primarily interested in building systems efficiency metrics – may include production metrics if there is interest.  Data reporting will be anonymous.

Tools and Publications  Cleanroom Programming Guide  Laboratory Design Guide  Design Intent Tool  Labs 21 Benchmarking Tool  Energy Research Roadmaps Available now from LBNL website:

Case Studies/Charrettes/Project Review  Various Industries and Institutions  Cleanroom Case Studies  Laboratory Case Studies  Data Center Case Studies  Charrettes and project reviews: IBM Genentech Sandia NEEA (fab of the future)  HP  LBNL Molecular Foundry  UC Merced Campus

Laboratories for the 21 st Century  Annual Conference – October 5-7, St.Louis  Training Seminars – nationwide  Labs 21 Partners  Tool kit Lab Design Guide Design Intent Tool  Website:

Energy Benchmarking Tool National database of lab energy use data  Web-based input and analysis  Currently approximately 40 facilities  Building level data (e.g. Site BTU/sf)  System level data (e.g. W/cfm)

Energy Benchmarking Tool Data input requirements Location Type Area Hours of operation Energy use Peak loads System characteristics Efficiency features

Benchmarking Tool – Analysis

Current Project Activities Cleanrooms Laboratories Data Centers

Current Cleanroom Activities  Energy benchmarking and best practices identification  Demand controlled filtration  Fan-filter test procedure  Investigate efficiency opportunity in minienvironments

Demand Controlled Filtration  Pilot study in LBNL cleanroom - completed  Workshop being planned to review the concept with industry  Alternate methods of recirculation setback investigated  Demonstration in an operating industry cleanroom (possibly Lam Research)

Fan-Filter Unit Test Procedure  Draft test procedure for energy performance issued for comments. Once in place, FFU’s performance can be measured by the standard test and will have a basis for “apples to apples” comparisons and owner specification.  IEST is developing a more comprehensive procedure  CA utility is interested in using the procedure to establish baselines for incentives  FFU manufacturers encouraged to volunteer their units for testing

Pressure vs. Airflow Velocity

Total “Pressure Efficiency”

FFU Energy Performance Index 0.5” Pressure

FFU Energy Performance Index 70 fpm Face

Minienvironment Investigation  Examine efficiency opportunity in selected minienvironment(s)  Partner with Asyst  Collaborate with Sematech  Develop strategies to improve efficiency

Minienvironment Investigation  Identify opportunities to improve overall facility energy efficiency  A field-study site is being sought  A demonstration in operating facility will be proposed to the CA Energy Commission

Current Laboratory Activities  Energy Benchmarking and Best Practices Identification  Low Flow Fume Hood Development  Overcoming Barriers (CAL/OSHA)  Side-by-Side Testing  3 Industrial Demonstrations

Better Fume Hood Containment at 40% Less Exhaust flow

And better worker safety

Current Data Center Activities  Energy Benchmarking and Best Practices Identification  Self Benchmarking Protocol  Investigate Efficiency Opportunity in UPS Systems  Investigate Efficiency Opportunity in Power Supplies

Additional Activities  Planning and Scoping Demonstration Projects  Controlling air flow based upon particle counts (Lam Research)  Fan-filter testing  Efficiency improvement in mini-environment (Asyst, Jazzsemiconductor)  Flow visualization using helium bubbles  Others ?  Technology Transfer

Sematech input to LBNL project  Ram Mallela and Phil Naughton are on the project advisory committee for the CEC project  Others are welcome to participate  The committee can recommend changes in direction  Next CA project advisory meeting – May 13  Participation in Labs 21 is welcome also

Questions? Bill TschudiTim Xu Website: