Para-Xylylene Dimer (Parylene Dimer DPX – C) Gaurav Chatterjee Reviewed by Faculty Oversight Committee

Key Danger from Chemical NFPA 704 standard – 1,1,0 Hazard Statement: – Irritation of skin and eyes due to over-exposure. – May ignite if exposed to extreme temperatures. – Negligible reactivity hazard

Key Danger from Chemical (continued.) Potential health effects: – Exposure by inhalation: Inhalation of dust of particulates may irritate throat and nose. Symptoms are cough and sore throat. Symptoms generally gone when exposed to fresh air. – Exposure by direct skin/eye contact: Prolonged exposure to skin might cause minor irritation. Contact to eyes may cause redness. Rinse with water for 15 mins, consult physician if symptoms persist. Chemical doesn’t get absorbed through skin. – Exposure by injection/ingestion: Neither injection nor ingestion are expected to be standard routes of contact. In case of contact with open wound, wash with water and consult physician.

Possibility of hazardous reactions: Not likely. It is a very stable material. Materials to avoid: This chemical will react to strong oxidising agent, strong acids and strong bases. Hazardous decomposition products: When exposed to extreme temperatures, gases like CO, CO 2 and HCL vapors are potential by-products. Signs and Symptoms of exposure: This chemical is a stable white powdery substance, and symptoms are expected to arise only on prolonged contact. The symptoms have already been elaborated. Key Danger from Chemical (continued.)

Fire Safety and accidental release Fire safety procedures: – Flash point: Not applicable – Auto ignition temperature: Not determined – Fire extinguishing materials : All are compatible Accidental release measures: – In case of small quantity spill, it can be cleaned with a mop or damp cloth/sponge to avoid dust. – Large spills are not expected as amount of chemical stored wont exceed 1kg.

Handling and Storage Care should be taken to avoid dust and direct contact to skin/eyes. Store in a cool, dry place away from sources of intense heat. Store away from incompatible materials – strong oxidising agents, strong acids and strong bases. It is proposed to store this chemical in the bio- MEMS lab, Micro-2 area in the chemical storage area (below fume hood).

Operating procedure and disposal Always use gloves to handle. Use a spatula to weigh the required amount to load in furnace and then store the stock bottle in a cool and dry place. This material can be classified as an organic polymer, and the same disposal policies for organic polymers can be employed here. Duration of experiment: This chemical acts as a seed material for polymerization, hence is the basic requirement for a parylene deposition system. It is expected that this material will be used indefinitely.

List of authorized users Prof. K L Narasimhan – Dr. Nidhi Maheshwari – – Phone: Gaurav Chatterjee – – Phone: Yashwanth Narayan – – Phone: More users to be added in accordance to existing CEN authorization policies.