Challenge the future Delft University of Technology Design of the actuator for the EUV full flex illuminator In cooperation with ASML Ruipan Chen, MSc. Department: PME, Specialisation: MSD

2 Contents Introduction: full flex illuminator What is a flex illuminator ? What is a full flex illuminator ? Actuator design: linear hybrid actuator Actuator requirements & building volume Actuator configuration Working principle Simulation results Stiffness analyses: parallel guiding Summary Confidential

3 Contents Introduction: full flex illuminator Actuator design: linear hybrid actuator Stiffness analyses: parallel guiding Summary Confidential

4 What is a Flex illuminator ? Tiltable mirror elements Confidential FlexRay changes illumination modes

5 A Full Flex illuminator is made to generate unlimited patterns Confidential

6 Flexures Full flex illuminator EUV light Approx. 45 cm Mirror surface Actuators Confidential

7 A mirror stack and its manipulators full flex illuminator Confidential

8 A single element and its manipulator Mirror can tilt around two axes Z and Y. This is realized by manipulating the two vertical rods. The actuator mover is connected to these rods Driving force: ±2 [N] (for the illuminator) Stroke ： ±2 [mm] full flex illuminator Confidential

9 Contents Introduction: full flex illuminator Actuator design: linear hybrid actuator Stiffness analyses: parallel guiding Summary Confidential

10 Actuator requirements Building volume: 60mm×36mm×6mm per actuator Linear actuator for mechatronic feedback system Driving force: ±2 [N] Stroke: ±2 [mm] Dissipation < 5 Watts per actuator The design goal Confidential

11 Actuator configuration Linear hybrid actuator Confidential

12 Actuator location Linear hybrid actuator Confidential

13 Reluctance force of a iron pole-pair Linear hybrid actuator Virtual work principle to determine the tangent force Fx. It is proportional to the flux squared. Confidential

14 Working principle Linear hybrid actuator Flux increased in airgap 1 and 3, decreased in 2 and 4. A net force is generated. Confidential

15 Analytical modelling Linear hybrid actuator Permanent magnet  Voltage source + resistance Current-carrying coils  Voltage source Airgap reluctances  Resistance. Confidential

16 Analytical modeling Linear hybrid actuator Assumptions: - No saturation - simplified 2-D airgap reluctance (no leakage flux, no fringing flux). Iron reluctance is neglected. Confidential

17 Analytical results MATLAB Confidential

18 2-D FEM results Oersted Confidential

19 3-D FEM results ANSYS workbench With an input current of 150 [A*turn] (corresponding to a dissipation of 4.3 [W]), the actuator is able to give a driving force of 2.3 [N] at the neutral position and 2.1 [N] at the end of the stroke. Confidential

20 Contents Introduction: full flex illuminator Actuator design: linear hybrid actuator Stiffness analyses: parallel guiding Summary Confidential

21 Three stiffnesses of the mechanism Stiffness analyses Stiffness of the illuminator: positive Stiffness of the parallel guiding: positive Normal force on parallel guiding: negative Confidential

22   The negative stiffness lower the total driving stiffness! The required driving force becomes 1.58 [N] with the help of the normal force. Energy method Confidential

23 Contents Introduction: full flex illuminator Actuator design: linear hybrid actuator Stiffness analyses: parallel guiding Summary Confidential

24 Summary Linear low inherent stiffness Low driving stiffness Easy water cooling - stator is equipped with coils and magnet. Cooling facility can be made easy. No contamination to the vacuum - clear mechanical clearance - magnets and coils are in one enclosure Merits of the actuator Confidential

25 Thank you for your attentions ! Please feel free to ask questions. Confidential

26 Backup slides Confidential

27 Backup slides Confidential

28 Backup slides Confidential

29 Backup slides Confidential

30 Backup slides Confidential

31 Backup slides Rotation angle: 5 degrees Deflection : 1mm Normal force Vs Euler formula: Normal force increased by 0.1 % Confidential