NCTU NFC Tool expert: Prof. Shun-Tun Yen Technician ： Ms. Lien-Chu Chen 高解析度場發射掃描電子顯微鏡暨能量散佈分析儀 Scanning Electron Microscope (S-4700I)

Tool name Chinese name ： 高解析度場發射掃描式電子顯微鏡 暨 能量散佈分析儀 English name ： High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer Acronym ： SEM & EDS NCTU NFC Yue-Ting Chen

Tool info manufacturer ： Hitachi model ： S-4700I Date of purchase ： May 1 st, NCTU NFC Yue-Ting Chen

Features SEM ： High-resolution inspection of devices, thin films, and cross-sections. EDS ： Energy-dispersive spectroscopic analysis of material or contamination composition on a desired spot. NCTU NFC Yue-Ting Chen

Tool spec E-gun source ： Cold cathodic E-gun Operation voltage ： 0.5kV~30kV Sample size ： 25mm diameter x 25mm(t) Working distance ： current setting at 12mm resolution ： 1.5nm (at 15kV) or 2.5nm (at 1kV) Highest mag: 500K(depending on the sample ） Resolution of secondary electrons:1.5nm(below 15kV) EDS could provide qualitative/quantitative atomic （ B 5 ~U 92 ） and elemental distribution analysis across the whole energy spectrum. NCTU NFC Yue-Ting Chen

Principles of SEM (Scanning Electron Microscope) Tool introduction E-gun: electron source Electromagnetic lens: for altering electron path direction Optical focus system Principles Electron migration path Interactions between electrons and matters Vacuum necessity and specimen chamber structure. NCTU NFC Yue-Ting Chen

Vacuum system Good vacuum is prerequisite for obtaining high quality images in SEM The vacuum is maintained by the following pumps : Electron chamber and electromagnetic lens: 3 ion pumps S.C.-Specimen Chamber: cycled-water chilled diffusion pump and rough pumping by a rotary pump S.E.C.- Specimen Exchange Chamber: Rotary pump NCTU NFC Yue-Ting Chen

Operation procedures Procedures ： SEM basic SOP ( please click) SEM basic SOP NCTU NFC Yue-Ting Chen

Tips Good sample conductivity ： The sample should be highly conductive to ensure sufficient detection of secondary electrons and clear images. Pt or Au capping can help improve the conductivity. However, too thin the capping does not help a lot and too thick of it might cover the inspected area. For less conductive samples such as Si or SiO 2, it is recommended to attach the carbon tape on the sample front side after Au deposition. This way, electrons are attracted toward the stage and only a slit is available for secondary electrons. NCTU NFC Yue-Ting Chen

Tips Avoid vibration ： For high-mag inspection, make sure the sample is firmly attached and the stage is well fastened. Stage lock feature can be enabled to reduce the vibration caused by external factors. (Once stage lock is enabled, tilt cannot be adjusted) NCTU NFC Yue-Ting Chen

Tips Vacuum ： the lower the better Accelerating voltage: higher voltage can lead to better images. The maximum voltage a sample can withstand depends on its own properties. Too high the voltage might damage the sample and result in pollutant generation. Discretion, attention, and patience are highly appreciated. NCTU NFC Yue-Ting Chen

SEM Pictures —taken by Ms. Yue-Ting Chen Gold particles with 10K mag 500nm for each spacing mag NCTU NFC Yue-Ting Chen

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles is clear with 150 K mag 30nm for each spacing mag NCTU NFC Yue-Ting Chen

Surface of gold particles with 250 K mag 20nm for each spacing mag SEM Pictures—taken by Ms. Yue-Ting Chen NCTU NFC Yue-Ting Chen

Surface of gold particles with 300 K mag 10nm for each spacing mag SEM Pictures—taken by Ms. Yue-Ting Chen NCTU NFC Yue-Ting Chen

Surface of gold particles with 400 K mag 10nm for each spacing mag SEM Pictures—taken by Ms. Yue-Ting Chen NCTU NFC Yue-Ting Chen

Surface of gold particles with 450 K mag 10nm for each spacing mag SEM Pictures—taken by Ms. Yue-Ting Chen NCTU NFC Yue-Ting Chen

Surface of gold particles with 500 K mag 10nm for each spacing mag SEM Pictures—taken by Ms. Yue-Ting Chen 10nm for each spacing NCTU NFC Yue-Ting Chen

The following pictures are taken by students from various affiliations. Through SEM, we can share our own skills and excellent pictures. SEM Pictures—taken by Ms. Yue-Ting Chen NCTU NFC Yue-Ting Chen

Carbon nano tube SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Zno nanowire SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

MOSFET device SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

High-K material SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Material for high-frequency devices SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

High-speed device SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

SiO 2 nanoparticle-fixing substrate SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

polymer micelles SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Carbon nano tube SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

CeO nano cube SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Cu SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

photonic crystal SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Nanoscale linewidth SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Surface analysis SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Surface analysis of Ti SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

GaN surface roughening for blue light LED SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Oxide-based nanowire SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Nylon film SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Blocking layer deposited via PECVD on Pet film SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

fiber SEM Pictures—taken by a student NCTU NFC Yue-Ting Chen

Conclusion Please cherish this multi- functional SEM !! NCTU NFC Yue-Ting Chen