Optics in micromanufacturing Prof. Yong-Gu Lee Phone: Course web site: Password for protected zip files: xxxx 1

Motivation Silicon manufacturing was a great success leading to integrated circuits, sensors (ex: gyroscopes, accelerometers), actuators (ex: DMD) Normally, manufacturing is done in batch processes without visual monitoring Optics allows real time monitoring of objects comparable to the wavelength of light (400nm~800nm) Sophisticated sensing, manipulation and manufacturing can be realized using optics 2

Micromanufacturing, micromanipulation and sensing 3 Sun et al, Elastic force analysis of functional polymer submicron oscillators, Appl. Phys. Lett. 79, 3173 (2001);

Course Outline Optics is an important subject in manufacturing micrometer scale devices and sensors. The goal of this course is to learn practices and the theory of optics used in micromanufacturing. Firstly, microscopy is covered as it is the basic tool used in examining micromanufacturing processes. Secondly, actuated stages and cameras used in advanced microscopes are covered. Thirdly, techniques for introducing lasers into microscopes and steering the laser and measuring the scattering of laser from particles are covered. Lastly, applications that utilize the instruments and theory covered in the courses are covered that include optical tweezers and microsterolithography. 4

Course focus Light microscopy (2 weeks) –basic light microscopy –phase contrast and darkfield microscopy –properties of polarized light and polarization microscopy –DIC, fluroscence, confocal microscopy Microscope stages (2 weeks) –Motorized stages –Piezo stages –Linear displacement sensors –SW control Microscope image acquisition (2 weeks) –CCD, CMOS cameras –SW control Laser steering in microscope (2 weeks) –Laser safety –Tilt mirrors –Spatial light modulators –SW control Laser scattering in microscope (2 weeks) –Theory –Quadrant Photo Diodes –SW control Force measurements (2 weeks) –Particle tracking –Optical Tweezers and Trap stiffness Microstereolithorgraphy Final examination (1 week) Term project presentations (1 week) 5

Syllabus 6 Weekly Course Schedule CalendarDescription Remarks 1 st week Introduction 2 nd weekLight microscopy 3 rd weekMotorized stages 4 th weekPiezo stages Assignment #1 5 th weekLinear displacement sensors 6 th weekCCD cameras/CMOS cameras 7th weekMid term examination 8 th weekLaser steering with tilt mirrors 9 th weekLaser steering with spatial light modulators Assignment #2 10 th week Laser scattering 11 th week Laser scattering measurements 12 th week Optical Tweezers and Trap stiffness Term project proposal due 13 th week Force measurements 14 th weekMicrostereolithography Term project progress report 15 th weekFinal exam 16 th weekTerm project presentation

Understandings Grades Assignments10 Term project30 Mid exam20 Final exam30 Class attendance10 _____________________ 100 A,B,C,F A~40% B~40% C,F~20% *Subject to change If you fail to attend more than 1/3 of the classes, you disqualify for taking any examinations further scheduled. Regulations on Courses, ART 25 (3) 7

Understandings Attendance –No excuses for absence Business trip Sick –Attendance credit Not to be later than 15 minutes No early leave Assignments –Penalties for late submissions –No credit for copied submissions, (original and copies) 8