Furnaces and Wet bench area Savitha P

Wet bench - Movement CMOS wet bench moving to the new clean room Purchase orders for chemicals still not released MOS chemicals will take 3-4 months to ship after release of the purchase order

Furnaces - Movement All except annealing furnaces moving to Equip. dev. room Maintenance need to be done for all – Change thermocouple (Euros ) – Gas connections to suit clean room – New tubes/ clean old tubes

Dektak, 4-probe, Film thickness probe measurement and CPD Moving to new clean room – Document made regarding precautions while moving Stylus/ probe tip to be protected Probe head to be cushioned – CPD moving to Equp. dev. room