National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy 28 May 2014 Cleanroom administrative committee Meeting

TUMS MURTHY User feedback – Survey results and Notes from user meeting Highlights and actions User fees review User statistics May 28, 2014 Agenda Cleanroom Admin Commitee Meeting

TUMS MURTHY May 28, 2014 Cleanroom Admin Commitee Meeting User Feedback User meeting May 26, 2014

TUMS MURTHY May 28, 2014 User satisfaction survey Cleanroom Admin Commitee Meeting

TUMS MURTHY Importance of feedback from users – Document successful recipes and equipment capability – Identify Problem areas – Suggestions for Improvement – Identify new requirements from Users May 28, 2014 User meeting May 26, 2014 Cleanroom Admin Commitee Meeting

TUMS MURTHY May 28, 2014 User meeting May 26, 2014 Cleanroom Admin Commitee Meeting Importance of a process run sheet – To identify Process integration issues and help resolve them – To assess feasibility of the particular step/process in the fab – To avoid contamination and possibility of affecting other users – To ensure maximum rate of success – Identify requirements of process development

TUMS MURTHY Request for structured training sessions on cleanroom procedures, Dos & Don’ts to be conducted periodically Better access to optimized process recipes Monitoring and replenishment of common chemicals Removal of Midnight to 6.00 am restriction Provision of drinking water in the cleanroom May 28, 2014 Cleanroom Admin Commitee Meeting User requests from online survey

TUMS MURTHY More software licenses for Raith E-line off-line work in the library Multi-user booking of equipment slot Deep UV resist, DUV source for MJB4 ? Pocketed wafers for small sample processing for RIEs and RTP Categorization of equipment into Clean, Semi-clean and Dirty – Being done where possible – To review the equipment availability for a more elaborate separation Individual user password where possible Shoes and Gloves - more sizes required May 28, 2014 Cleanroom Admin Commitee Meeting User meeting May 26, 2014

TUMS MURTHY May 28, 2014 Cleanroom Admin Commitee Meeting Highlights

TUMS MURTHY Performance review for the NNfC staff was completed and increment letters issued – Major errors in tenure expiry dates Annual NNfC and MNCF staff meeting with Faculty was held on April 29, 2014 Emergency evacuation drill was conducted on April 30, 2014 Effluent testing- PO issued to Shriram Institute Samples given. Results expected this week May 28, 2014 Cleanroom Admin Commitee Meeting Highlights

TUMS MURTHY Bio-metric system basic functionality restored – Glitches remain ( communications issue, smart card use) – Bought one new reader. Need to review long term strategy BMS system had its first major break down – One analogue controller card failure – Major controls restored by sacrificing PCW automatic control – Need to buy critical spare cards and other hardware. Sourcing from Regin (OEM) May 28, 2014 Cleanroom Admin Commitee Meeting Highlights contd.

TUMS MURTHY 11 pedestals of raised floor were changed in wet etch room due to heavy corrosion and rust Steps being taken to mitigate effects of leaks and spills May 28, 2014 Cleanroom Admin Commitee Meeting Wet etch room raised floor

TUMS MURTHY New seating for NNfC staff on Mezzanine floor – Carpentry work started. To be completed by June – Electrical and AC works to be finalized. Expected completion by end July DG smoke stack extension- contractor to be identified Ground floor cleanroom peripheral corridor PVC flooring to be changed - pending decision May 28, 2014 Cleanroom Admin Commitee Meeting Pending Action Items

TUMS MURTHY May 28, 2014 Cleanroom Admin Commitee Meeting User fees review

TUMS MURTHY Summary Chart SNF Rates What we are doing similar to other Nanofabs – No detailed cost-of-ownership or process costing is done – Categorize the users ( internal, academic, industry, Government etc.) – Multi-tier charge by category of equipment ; general, special, premium etc – Have some form of cap on usage charges May 28, 2014 Cleanroom Admin Commitee Meeting User fees review

TUMS MURTHY What we are not doing – Charge an access fee to enter the Fab in addition to actual equipment usage charges – Staff charges ; we are doing for external users only – Charge for Direct materials ( Precious metals, wafers and such) ; we are doing for paid projects only – Overhead Charges ( F & A ) ; we are doing for paid projects only May 28, 2014 Cleanroom Admin Commitee Meeting User fees Review

TUMS MURTHY May 28, 2014 Cleanroom Admin Commitee Meeting User Statistics

TUMS MURTHY User statistics April month charges – 82 Users ; 46 from CeNSE – Total charges at a high of 18 2 Lakhs CeNSE users charged 75% of total down from 80% May 28, 2014 Reports Cleanroom Admin Commitee Meeting

TUMS MURTHY May 28, 2014 Cleanroom Admin Commitee Meeting