Customer list includes more than 60% of the major semiconductor manufacturers worldwide. Fabworx robots and component products have been successfully installed in PVD, CVD, Etch and RTP departments in 150mm, 200mm and 300mm fabs.

Fabhp-hdp for extended reach tools Fabhp-v Fabpro Fabhp-v 300 Fabworx Solutions offers robots for Endura®, Centura® and Producer® applications: Fabhp Fabhp-ht for high-temperature processes such as Rapid Thermal Processing (RTP) and Epitaxal Layer (EPI) Fabhp-hdp for extended reach tools Fabhp-v Fabpro Fabhp-v 300 Fabhp-v 300 RTP Fabht 300 Endura, Centura and Producer are registered trademarks of Applied Materials, Inc.

Fabworx robots have been engineered to: Reduce particles Eliminate scratching Increase repeatability Enhance tool throughput Generate greater return on investment

Fabworx Solutions offers a line of OEM-compatible component products designed to improve the performance of your existing robots. 150/200mm components include: Pivot assembly for HP®, HP+, HDP, VHP® or VHP+ robots HP®/HP+ hub assembly VHP® hub bearings Elbow assembly and elbow bearings for HP®, HP+, VHP® and VHP+ robots End effectors Thin Profile Moly Blades for Buffer Chamber Gravity Edge Hold™ (GEH) End Effector for Transfer Chamber 300mm components include: Wrist upgrades for VHP® or XP® robot End effectors with o-rings or Gravity Edge Hold™ technology HP, VHP and XP are registered trademarks of Applied Materials, Inc.

Tightness of x-style bearing reduces wrist droop. Snap-on cover eliminates inconsistencies in setup and increases bearing life. Enclosed bearings reduce particle escape and potential contamination of wafers. 2-bearing pivot assembly decreases future replacement costs as compared to 4-bearing OEM design. Durability of ceramic bearings and stainless steel races allow for 3+ years of use without replacement or repair. Tightness of x-style bearing reduces wrist droop. Includes a 2 year warranty. Available for AMAT HP®, HP+, VHP® and VHP+ 150mm and 200mm robots. HP and VHP are registered trademarks of Applied Materials, Inc.

Increased spring force keeps the hub assembly vertically Hybrid ceramic bearings increase product life span and reduce particles. Integral shields increase race stiffness and help retain lubricant to further reduce particles. Patented stainless steel hub spacers provide stiffness against twisting and distorting. Increased spring force keeps the hub assembly vertically aligned to ensure bearing stability and reduce robot droop. Upper and lower bearing spacers are pinned together to eliminate lateral motion during robot. Upper and lower motors are locked in place to eliminate motor jumping and twisting and improve repeatability. For 150mm and 200mm HP® and HP+ robots. HP is a registered trademark of Applied Materials, Inc.

High-performance, long-life grease is compatible with Bearings consist of ceramic load-bearing balls with smaller stainless steel spacer balls for durability. Races are made from hardened 440 stainless steel to reduce wear and increase product life. Shields help to retain lubricant within the bearing to further reduce particle contamination. High-performance, long-life grease is compatible with high-vacuum environments and a wide range of process chemistries. Available for AMAT VHP® and Producer® 200mm and 300mm robots. VHP and Producer are registered trademarks of Applied Materials, Inc.

Features an improved shaft and bearing spring preload mechanism. Wave spring gives consistent and even force to the bearings, resulting in longer bearing life and decreased droop. Fixed spring cap eliminates tension adjustment and setup variability. Includes a 2 year warranty. Available for AMAT HP and HDP and robots. High-quality elbow bearings kits are available For HP+ and VHP+ robots.

Preventive maintenance (PM) is eliminated. Designed to improve yield and productivity in Endura® and Centura® platforms. Patented interconnected stainless steel bands replace interlocking pivot gears, improving reliability and wafer placement repeatability. Preventive maintenance (PM) is eliminated. Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particles from entering the process environment. Compatible with 300mm VHP® and XP® robots. Centura, Endura, VHP, and XP are registered trademarks of Applied Materials, Inc. OEM WRIST FABWORX WRIST

150mm, 200mm and 300mm end effectors available Three replaceable perfluoroeslastomer o-rings provide exceptional coefficient of friction to eliminate wafer sliding and associated particles. O-rings are rated for process temperatures up to 485*C. Location of o-rings removes the topographical stress normally caused by wafer bowing when a wafer is supported by its outside diameter. Available in designs suitable for the buffer or transfer chamber. A variety of end effector materials are available, including stress-free 6061 aluminum, alumina-ceramic coatings, Titanium and molybdenum.

Fabworx Solutions designs and manufactures yield and productivity improvement products for existing fab equipment. Our product roadmap is driven by our customer’s tool issues an we have developed efficient methodologies for working with them on new products.