L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Introduction Laurie McTurk Motorola, Quality, EKB, Scotland Six Sigma Black Belt (1995) Dennis Wilson Motorola, Process eng, MOS9, EKB, Scotland Six Sigma Black Belt candidate

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Contents Manufacturing Semiconductors Inline process control Maintaining good control limits with x,000 charts Trying to see ‘the wood for the trees’ Managing ownership and driving continuous improvement

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Objective is to turn Silicon wafers into ICs Each wafer can have ~300 to X,000 ICs Yield is determined by how many wafers remain after all processes + What proportion of ICs function when tested (% good area of wafer).

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Sequential process Typically ~300 processes, 3 -4 weeks cycle time Can be up to 600 processes Electrical functional testing Inline process measurement & control

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Serial processing All processes have the potential to scrap a batch. IC verification is only possible after all inline processing is complete. Inline process control must be maintained to avoid scrap product arriving at electrical verification. Inline process control maintains optimum processing conditions leading to maximized production yield.

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Process control Each individual process must have Process monitor Indicator of the completed IC performance E.g Measured polysilicon gate dimension Transistor channel length Speed of the circuit. Homogenous data stream Use SPC to maintain control

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. SPS Scotland Sample Plan example 3 wafers, 3 data sites per wafer

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Factory wide computer system Data entered into data collection files and subsequent control charts. Data is charted by machine Trends and shifts within the process are detected by applying Western Electric control rules to the charts. Out of limit rule violation results in immediate, automated equipment shutdown, guarding against any further product risk.

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Automated out of limit actions, however, are only useful if the imposed limits are accurate. Limits too loose Significant changes/excursions go undetected until fab completion possible scrap, reduced yield, etc.

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Limits too tight false alarms/‘white noise’ poor productivity over adjustment increased variability frustration from the front line operators

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Western Electric control rules are probability based tests Some risk that a process is behaving differently from previous history.

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. The Instability index A tool to identify charts that are not performing according to the control limits and centrelines installed Number of control rules violated within time period Number of points collected within time period

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. The daily Istab report thus catches Xbar charts with too wide control limits Range, Std Dev, Particle charts with limits set too high

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. The Istab is at a minimum when The fewest excursions occur The control limits and centerlines are accurate The process is stable Off target & Out of control Off target & wide limits Stable process & accurate control limits

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Using the Istab metric in this fashion promotes the use of accurate control limits and centerlines FROM TO Even on skewed distributions like particles, Ranges, Std.Dev

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Two tier control rule system Engineering warning Western Electric rules inside control limits (e.g. 8 points one side of the centreline) minimizing production false alarms Automated immediate equipment shutdown on control limit violation With accurate control limits and centrelines established Increase in Istab is an early warning of a change in the process Control limit violation is likely to be due to a real process excursion Less likely to be a false alarm.

L.McTurk Aug 2002 Motorola General Business Use Motorola, the Stylized M, and all other trademarks indicated as such herein are trademarks of Motorola, Inc. ® Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. © Motorola, Inc All rights reserved. Create a measure the measures to maintain process control Is the metric is being used to identify and rectify problems ? Derive a mean daily Istab per process group and per engineer Chart file labels identify ownership by process section and by engineer Trend graph the mean of these Istabs for each day A 60 day rolling trend shows if process control is Improving Worsening Stable Breaking the trend out by owner drives consistency across the factory