Electrical-Mechanical Transduction. For the generalized capacitor (potential energy): For a linear electrical capacitor: ε – permitivity A – area G.

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Presentation transcript:

Electrical-Mechanical Transduction

For the generalized capacitor (potential energy): For a linear electrical capacitor: ε – permitivity A – area G – Gap

Comb Drive – Another version of the electrostatic actuator. What is different? Before, C=  A/g Now, C=C 0 +C 1 x Linear in x, the direction of motion. Consequences? The Force is constant.

Look at one finger, treat capacitance as that of a parallel plate capacitor: Then C=  A/g. A=lt. C=  lt/g, but remember that g is a constant. So, C=  lt/g=C 1 l (or =C 1 x)