NATIONAL NANOFABRICATION CENTRE CLEANROOM ADMINISTRATIVE COMMITTEE MEETING TUMS Murthy 27 Mar 2012.

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Presentation transcript:

NATIONAL NANOFABRICATION CENTRE CLEANROOM ADMINISTRATIVE COMMITTEE MEETING TUMS Murthy 27 Mar 2012

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Agenda  Infrastructure installation and commissioning  Utilities  Fab Equipment  Operations  Operation procedures and protocols  User Training  Preventive and Breakdown Maintenance ; Planning for Consumables, spares etc  Manpower

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Utilities  All the utilities have been installed and commissioned  Following utilities did not meet the specifications and need modification  Dry exhaust and dry scrubber  BMS  Systems that have not been tested  Wet Scrubber  Humidifier  Sprinklers

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Utilities contd.  Utilities that need upgrading or enhancement  Heat and smoke detector system. System to be upgraded to an addressable system  Biometric access for staircase to Mezzanine floor  Walkie-talkies for communication among fab and utilities staff  Utilities under installation  Borewell water treatment plant

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Nanofab Tools  Litho  All tools installed and commissioned E-line vibration isolation to be installed  Plasma processing  All tools installed and commissioned  Wet procesing  3 out of 6 benches have been installed Replacement for broken Quartz baths received. Waiting for installation engineer from Felcon to arrive to complete installation

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Nanofab Tools  Films  One sputter tool working  Waiting replacement spares and Tecport Engineer’s schedule for commissioning one more sputtering system and Ebeam evap system  Furnaces  LPCVD 3 tubes working  Problems with other tubes and the wet scrubber to be resolved

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Operations  Operation procedures and protocols  Safety related  Equipment operation procedures  User Training  Training schedules under preparation  Utilities maintenance the key to operations  Most critical systems out of manufacturer warranty  AMC with various manufacturers or with Ellipsiz

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Operations contd.  Manpower recruitment and training is a priority  For second shift staffing  For Nano Fab Equipment and process maintenance  Fine tuning, enhancement and preventive maintenance of utilities  Preliminary quote obtained for Employee Medical and Accident Group Insurance

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Other Issues  Electrical Distribution continues to be a worry with several unexplained incidents  Latest is the burnt contactors in the Capacitance Bank for power factor correction  Root cause of earlier incidents of MCB tripping (ref : POU 610 scrubber ) and Noise from UPS could not be found

TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Capacitance Bank damage Insulation Burnt