Prospect for Si sensors in Korea Y. Kwon (Yonsei Univ.)

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Presentation transcript:

Prospect for Si sensors in Korea Y. Kwon (Yonsei Univ.)

What is Si sensor? (Sensor on Si wafer)

What is Si sensor? (Diced sensor)

Introduction for student

How do we make it? (CMOS process) High purity Si waferOxidation Ion implant Oxide layer deposition Etch for contact Metal layer deposition Passivation

How does it operate? -

7/32 KPS, Fall 2010 Cosmic muon test

Possibility in Korea

Si sensor in general Mature technology Reliable performance Fine granule Higher energy and time resolution (than gaseous ionization detectors) Key burden is cost.

Korean Strength Productivity! –Large amount of Si sensors produced with the standard CMOS process

6 inch fabrication line 11/32 8 inch fabrication line R&D environment 300 cm 2 ~ $ 500

Application

“A” Si/W calorimeter prototype Large amount of Si sensors needed!

Schematics Segment - 0Segment - 1Segment - 2 Lateral Longitudinal 8 pad sensors in one carrier board 15 mm W, 4mm

15 SEG0SEG1 SEG2 y z PADSTRIPW -R M <y<R M FOCAL - schematic view (y-z view) (EM Shower by single e) ~1X 0 x 20

Current snapshot

MPC-EX for PHENIX Application as a pre-shower for EMCal (Electromagnetic calorimeter)

Sensor Design

Segmentation as a pre-shower # of PADs =32 # of PADs =4 Total # of PADs = cm 0.18cm 1.5cm

Fine structure PADs of Sensor Bondin g PADs Bias Guardrin g Floating Guardring (3 layer structure) Edge Rounding

Process monitoring

C–V simulation Substrate specification –  (resistivity) = 6,9,12,18 kΩ∙cm –thickness = 405μm –orientation = Full depletion –90V(6kΩ∙cm) –60V(9kΩ∙cm) –45V(12kΩ∙cm) –30V(18kΩ∙cm)

Test system

Test electronics

Actual test

Measurement : Capacitance

Measurement : Leakage current < 1  A for whole sensor!

Electric circuit test We measured resistance between neighboring channels. Small fraction of them had short. Current yield ~ 30%. Statistics sugge st the short is between metal traces. Stringent metal etching pro cess is expected to cure the problem. 30  1.5 cm 3 cm cm

Ending comment Challenges are there…, but bright future is ahead!