FE-SEM foil thickness measurements. Process Mount sister foils to Si wafers – Static for thinner foils – “glue” with aerodag carbon suspension for thicker.

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Presentation transcript:

FE-SEM foil thickness measurements

Process Mount sister foils to Si wafers – Static for thinner foils – “glue” with aerodag carbon suspension for thicker Mamun makes images Use ImageJ software to measure.tiff images saved from FE-SEM process

Comparison of edge find tool Analyzed images 05 and 06 with edge contrast on or off Find that the edge contrast tends to skew measurements slightly larger – Variation between images larger than variation between images Conclusion: – make sure to go on inside edges of “edge find” line to get more accurate results

Image 06 Measurement with and without edge find

Image 05: original image, edge find

Statistical analysis of points measured spots selected by eye, original image

Thickness distribution, edge find 5613D image05, spots selected by eye

Statistics from even distribution 5613 M05 even stripe distance (don’t skip any oddities)

5613D Image 03: 360 ± 17 nm Image 05: 397 ± 10 nm Image 06: 392 ± 10.5 nm

Conclusions: 5613D Original image, Weighted mean microns ± Edge find image, Weighted mean microns ± Even stripes image, Weighted mean microns ± Thickness is robust to within error bars for any of the methods

Foil ± 16 nm 772 ± 13 nm Average: 776 nm ± 10.1

Foil 6809 Image 03: / Image 04: ± nm Image 06: ± nm ± 2.766

Ladder positionFoil numberQuoted thickness (nm)Measured thickness (nm) ± ± ± ± ± ± ± ± nm ± ± ± 100