Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Jean-Marie MACKOWSKI Université Claude Bernard Lyon 1 SMA-VIRGO Bât , Bd Niels Bohr Villeurbanne Cedex Phone : Fax : Jean-Marie MACKOWSKI Université Claude Bernard Lyon 1 SMA-VIRGO Bât , Bd Niels Bohr Villeurbanne Cedex Phone : Fax :

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU COATING DEPOSITION TECHNIQUES VIRGO EXPERIENCE VIRGO METROLOGY & OPTICS PERFORMANCES LIMITATIONS SOURCES COATING DEPOSITION TECHNIQUES VIRGO EXPERIENCE VIRGO METROLOGY & OPTICS PERFORMANCES LIMITATIONS SOURCES

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations COATINGS DEPOSITION TECHNIQUES TODAY MENU

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations ION ASSISTED DEPOSITIONAD coating crucible substrat Assistance source Vapor flow material Electron beam, Joule effect, Laser, …

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations I.B.S. Deposition Principles

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations I.B.S. Deposition Systems

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations C.V.D Plasma Deposition Systems

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations FROM SOURCE TO SUBSTRAT SURFACE Source Temperature Emission law Medium pressure Substrat Temperature Vapor flow: nature, direction, energy Evaporation:0.1 eV (1100K)m.s -1 Sputtering:10 to 50 eV km.s -1

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Dimension: 2x2.2x2.2 m 3 Vacuum: mBar DIBS technology Environment: Class 1 VIRGO LARGE COATER

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations CLASS 1 CLEAN ROOM BEFORE INTEGRATION

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO LARGE COATER robot simple rotation

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations with masking on  700 mm without masking on  350 mm COATING THICKNESS UNIFORMITY

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SiO2 Target Sputtered Atomes Mask Ion Source Mirror Interferometer Robot CORRECTIVE COATING

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 30 nm P.V nm P.V. 0 beforecorrection aftercorrection 6 nm R.M.S 1.5 nm R.M.S. CORRECTIVE COATING

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations IBS COATER  1064 nm : 0.2 / 1 ppm  Process 1064 nm : 0.6 / 4 ppm  Centring Wavelength repeatability : +/- 0.4 %  Wavefront after Corrective Coating : <1 nm  1064 nm : 0.2 / 1 ppm  Process 1064 nm : 0.6 / 4 ppm  Centring Wavelength repeatability : +/- 0.4 %  Wavefront after Corrective Coating : <1 nm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU VIRGO EXPERIMENT

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGOVIRGO FRANC0-ITALIEN PROJECT 11 Laboratories 5 in France 11 in Italy 200 people 100 M€ Antenna Located at PISA FRANC0-ITALIEN PROJECT 11 Laboratories 5 in France 11 in Italy 200 people 100 M€ Antenna Located at PISA

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LASER YAG:Nd W détecteur AR R< MIRROR R=0.92 BS R=0.5 AR R<10 -3 AR R< MIRROR R=0.88 MIRROR R=0.88 AR R< MIRROR HR R= MIRROR HR R= DETECTOR 3 km MRMRMRMR M E2 M E1 M I2 M I1 B.S. VIRGO INTERFEROMETER

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO SITE

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO TUNNEL

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO CENTRAL BUILDING N W

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO SUSPENSIONS

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Beam splitter

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU VIRGO METROLOGY & OPTICS PERFORMANCES VIRGO METROLOGY & OPTICS PERFORMANCES

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Bulk diameter : 350 mm Coating diameter : 330 mm Bulk Thickness : 96 mm FIRST VIRGO MIRROR

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Absorption Birefringence Relative reflexion Wave front (stitching) Scattering Transmission Microroughness Defect detection METROLOGY OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Université Lyon I SMASMA

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 28W CW YAG:Nd 3+ pump laser Mappings up to Ø400 mm Mesurement of the coating absorption … … as well as the bulk absorption ABSORPTION BENCH

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Sensitivity: 20 ppb 0,63  0.07 ppm Ø 150mm COATING ABSORPTION 1064 nm on Ø 150 mm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Sensitivity: 30 ppb.cm -1 0,74  0.05 ppm.cm -1 Ø 150mm BULK ABSORPTION 1064 nm on Ø 150 mm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Mesurement of the amplitude as well as the principle axis direction. Mappings up to Ø400 mm. losses due to birefringence in P or S polarisation (log 10 ) BIREFRINGENCE BENCH

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Amplitude. Sensitivity: rad.cm -1 Principle axis direction BIREFRINGENCE (VIM01) on Ø 150 mm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SENSITIVITY:  R/R = RELATIVE REFLEXION BENCH

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations WAVE FRONT MEASUREMENT

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations WAVE FRONT (VEM04) on Ø 150 mm 3.8 mn RMS 29 nm PV Ø 150mm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations STITCHING

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations STITCHING WAVE FRONT (VEM04) on Ø 280 mm 11.6 mn RMS 73.8 nm PV Ø 280mm

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SCATTERING MEASUREMENT

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 4 ppm 150  150 mm SCATTERING (VEM04) on 150  150 mm 2

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 42.9  0.2 ppm Ø50mm TRANSMISSION (VEM04) on 150  150 mm 2

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MICROROUGHNESS DEFECT DETECTION MICROMAP

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations END MIRROR (VEM04) OPTICAL PERFORMANCES

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU LIMITATION SOURCES OF PERFORMANCE LIMITATION SOURCES OF PERFORMANCE

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LIMITATION SOURCES SUBSTRATE (BULK) CHEMICALS USED FOR THE POLISHING PROCESS CHEMICALS USED FOR THE CLEANING PROCEDURE SPUTTERING TARGETS COATER WALLS ION SOURCES COMPONENTS GAZ USED FOR DEPOSITION PROCESS, … MATERIALS PURITY ENVIRONNEMENTAL CONDITIONS PARTICULATE CONTAMINATIONS ORGANIC CONTAMINATIONS BOXES FOR TRANSFERT & TRANSPORTATION

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LIMITATION SOURCES MATERIALS PURITY & MATERIALS PURITY & ENVIRONNEMENTAL CONDITIONS CONTROL ENVIRONNEMENTAL CONDITIONS CONTROL PHYSICO-CHEMICAL ANALYSIS TOOLS LIKE : ESCA, RBS, AUGER, SEM, XTM, SIMS… PHYSICO-CHEMICAL ANALYSIS TOOLS LIKE : ESCA, RBS, AUGER, SEM, XTM, SIMS…

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SIMS PRINCIPLES e- Acquisition Secondary Ions m/e Electron beam (flood gun) SAMPLE Common Ions Sources O +, Ar +, Cs +, Ga + … Magnetic Quadrupole Scintillator

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MIRRORS :SIMS PROFILES SiO2 Ta205 Na + 23 K + 39

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Ta+Si+Ti+ MIRRORS :SIMS PROFILES

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MIRRORS :SIMS PROFILES

Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations CONCLUSION AT THIS STEP, OPTICAL LOSSES IMPROVEMENT AT THIS STEP, OPTICAL LOSSES IMPROVEMENT NEEDS BIG R&D EFFORTS