INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #9
NPN Transistor Fabrication Introduction NPN Fabrication-Simple Flow AMI Bipolar Transistor Process Bipolar Fabrication –Masking Layers Typical Bipolar Resistor Technology
Introduction ( Chip Fabrication Cycle)
NPN Transistor (BJT) Fabrication Example Emitter Base Collector
Bipolar Transistor
Bipolar Transistor Fabrication – Simple
AMI Bipolar Transistor Process Oxide P+substrate P-Epi Layer The beginning wafer is a P-epitaxial layer On a P+ substrate that is oxidized.
AMI Bipolar Transistor Process N-Tub Collector Oxide P-Epi Layer N-Tub Field Oxide Collector Field Oxide P-Epi Layer N-Tub Field Oxidation
AMI Bipolar Transistor Process N-Tub Field Oxide P-base Collector Field Oxide P-Epi Layer P-Base Formation P+ N-Tub Field Oxide P-base Collector Field Oxide P-Epi Layer P+ Contact Formation
AMI Bipolar Transistor Process N+P+ N-Tub Field Oxide P-base Collector N+ Field Oxide P-Epi Layer N+ Emitter and Collector Contact Formation N+P+ N-Tub Field Oxide P-base Collector N+ Field Oxide P-Epi Layer Oxide Contact Apertures Oxide
Bipolar Fabrication – Masking Layers Mask No.Physical LayerAMI NameGDS Level No. 1N-type WellN_WELL1 2Field OxideACTIVE3 3P-type BasePBASE2 4P+ S-D Ion ImplantP_PLUS_SELECT11 5N+ S-D Ion ImplantN_PLUS_SELECT12 6Contact OpeningsCONTACT14 7First MetalMETAL 115 8Vias between MetalVIA16 9Second MetalMETAL Bond Pad OpeningsGLASS18
Typical Bipolar Resistor Technology N-Tub Field Oxide P-base Field Oxide P-Epi Layer P-Base Resistor Formation N+P+ Top view of The resistor P+N+
Thanks Many thanks to Prof. Hany Fikry and Prof Wael Fikry for their useful materials that help me to prepare this presentation.