The Mask-Sphere, M-S Is calibrated by setting it into the conical cup and recording the mask position with a fixed C- CCD. The M-S is rotated 4x by 90°

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Presentation transcript:

The Mask-Sphere, M-S Is calibrated by setting it into the conical cup and recording the mask position with a fixed C- CCD. The M-S is rotated 4x by 90° around the vertical axis and the center of the M-S is the mean of those readings. ( ± 2µm) Purpose: The position of a cone can be measured by a CMM (using a sphere) as well as with a C- CCD (using the M-S). Hence calibrating the position of a C-CCD with a CMM. Glass-RASNIK glued to Center of 19mm Brass Sphere MagnetIron plate LEDs Calibration

Inverted C-CCD with FOP in middle of alu frame, 5- C-CCD mounted on PCB and sitting on M-S 1 4 M-S Calibration 1- Cone w/ inverted M-S, 2- M-S in cone clamped to vertical stage, 3- Flexible PCB mounted on x-y sage,

Surveyed Reference Ruler for CMM for Ruler The “Ruler” measures the distance between two spheres (conical cups) M-S

The M-S was rotated to 0°, 90°, 180°, 270° and 360° and the images were analyzed at nine different reference points. The 0° and 360° degree measurments agreed to 3µm and 4µm RMS in x and y. The center of rotation of the M-S was found to be the same for each of the nine points with in a stdev of 2 and 3µ

The stdev of x and y for 0 and 360° measurements was reduced to 2.5µm and 3.3µm. The center of rotation of the M-S was found to be the same for each of the nine points within a stdev of 1.1µm and 0.9µ. The same images were analyzed with the reference point 100µm in x and y from the center of rotation.

~ ~19 ~ Calibration & Test Plate for 100/141mm ±2mm Ruler 12 – 100±1mm 8 – 141±1mm 3 rd points to “balance” ruler

First Ruler Measurements The ruler can rotate about its single ball changing the y-position of the CCD wrt the M-S. It was set down ten times: 5x somewhat controlling the y- position, 5x w/o any control. The graph shows that the M-S was rotated by about 1/40 radians. Correcting for this rotation reduces the sigma of the distance measurement from 27µm to 4.