Scanning Electron Microscope, SEM

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Scanning Electron Microscope, SEM Jingming Long, Nanna Rut Jónsdóttir, Kári Sveinbjörnsson & Guðfinnur Baldur Skæringsson 12/10/2010

Content 1. The principle of SEM 2. Device 3. Sample preparation

The principle of SEM 5~10nm 0.5~2nm

Device 背向散射電子偵測器 Nitrogen gas inlet Column Controlers X-Ray Detector Sample Chamber Door Gold Coater?

Device

Device

Sample preparation All samples must conduct electricity. To measure a non-conducting sample it must be covered with a thin layer of gold. Non-conducting samples usually not chemically analyzed. Sulphur cannot be analyzed in a non-conducting sample, Au and S appear at similar places in X-ray. 回首頁

Example Secondary electron Backscattered electron

Example Energy dispersive spectrometry EDS X ray characteristics analysis of element