Modu-lab Low Cost Tools for High Tech Learning Electro-Mechanical Services, Inc. 109 Hermosa Dr. SE Albuquerque, NM Ph: Fx: DIFFUSION FURNACE WET ETCH METROLOGY DEVICE CHARACTERIZE WET PROCESS PVD PHOTLITHOGRAPHY HOTWALL C.V.D. PLASMA Modu-Lab lab layout: This page shows one example of a training lab layout. The approximate scaling is for a room of 7 meters X 15 meters ( ~20 ft. X 45 ft). The gray areas approximate the user areas and delineate free space for operation and maintenance of the systems. The blue is the actual module outline. The modules come in two lengths with only 1 width. The width is 77 cm (30in.) and the lengths are 153 cm(60 in) and 183 cm (72 in.). Modules with circles require exhaust. A large circle designates approx 8.5 m 3 /min(300CFM). The small circle designates a flow of 1.4 m 3 /min.(50CFM) Both flows are with a static pressure of.3 mm H 2 O(1/8”wg). SAFETY EYE WASH OXIDATION FURNACE WET ETCH METROLOGY DEVICE CHARACTERIZE WET PROCESS PVD PHOTLITHOGRAPHY PLASMA HOTWALL C.V.D. OXIDATION FURNACE DIFFUSION FURNACE The layout above shows a full complement of modules. A basic complement that will allow fabrication of transistors, diodes, capacitors and resistors does not utilize the Hotwall or Plasma systems. The fume hood and eye wash are not supplied by EMS. The fume hood is not required, but is highly recommended. The object below are for cutting and pasting into your own layout drawing. In order to rotate the objects correctly, you may have to ungroup the object and manipulate accordingly. SMALL FUME HOOD

Modu-lab Low Cost Tools for High Tech Learning Electro-Mechanical Services, Inc. 109 Hermosa Dr. SE Albuquerque, NM Ph: Fx: WET ETCH METROLOGY DEVICE CHARACTERIZE WET PROCESS PVD PHOTLITHOGRAPHY HOTWALL C.V.D. PLASMA DIFFUSION FURNACEOXIDATION FURNACE SAFETY EYE WASH SMALL FUME HOOD

Modu-lab Low Cost Tools for High Tech Learning Electro-Mechanical Services, Inc. 109 Hermosa Dr. SE Albuquerque, NM Ph: Fx: Layout and Installation Notes: 1)The lab should have eyewash and/or safety shower 2)A fume hood with a sink has proven to be a nice advantage to the lab. 3)A small DI water system is also recommended - the alternative is to provide rinse water in jugs. Distilled water works pretty good. 4)Always keep in mind the required free space around the modules. 5)The use access designation is the dimension from which usage of the module is accessed. eg - the WPM is used from the width side. 6) Maintaining the water supply tanks in the WPM and WEM requires access to both ends in order to remove and replace the rinse water supply. 7)The furnaces are loaded and unloaded from the end; but gas and temp control are accessed on the right hand side when facing the front end. 8)The wet processors are easily field retrofitted for connection to house water and drains. 9)When constructing a layout, it may be advantageous to place exhausted modules in the same vicinity to minimize duct work.