INESC Microsystems and Nanotechnologies www.inesc-mn.pt.

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INESC Microsystems and Nanotechnologies

Our environment INESC Holding Private, nonprofit transfer of technology Tecnico Lisboa engineering school IN LA INESC-MN Private, nonprofit research institute Universidade de Lisboa

INESC-MN - People photo taken September 2012 Senior PIs: 5Master’s students:17 Junior PIs (Ciência):2Research Interns:4 Post-Docs:7Cleanroom engineers:3 PhD students:11Administrative Assist.1.5

INESC Microssistemas e Nanotecnologias – INESC-MN the infrastructure Class 100/10 cleanroom (~100 m 2 ) constructed in 1992/1993 Micro and nanofabrication for feature sizes down to 1.2 µm (optical) and 20 nm (e-beam) Chemical wetbench for biological processing in Class 100 cleanroom Class 10,000 area for support equipment and film deposition laboratory (~150 m 2 ) Laboratories for film and device characterization (electronic, optical, micromechanical and biological) Laboratory for soft-lithography

Spintronics: (Paulo Freitas, Susana Cardoso) Sensors Spin Electronics Thin Film electronics and MEMS: (João Pedro Conde and Virginia Chu) Thin film amorphous and nanocrystalline silicon MEMS and polymer MEMS Large Area Electronics on glass and polymer substrates Biological Applications * : (P. Freitas, J.P. Conde, V. Chu) DNA, Protein and Cell Manipulation, Arraying Magnetic Biodetection (Spintronic sensors) Electronic, Optical and Micromechanical Biodetection Microfluidics and Lab-on-Chip Microelectrodes for neuroelectronics * collaboration IBB/BERG, IMM Materials Simulations: (José Luís Martins) Simulations of semiconductors Development of methods and codes Ciência researchers: Carbon nanotubes (Sara Vieira) Organic nanoelectronics (Helena Alves) INESC-MN - main research areas

Role in DEMOTOX Transfer technology developed in OTASENSE to the production of the prototype in DEMOTOX Design and fabrication of thin film photosensor integrated to microfludics for DEMOTOX-BIO Training and support in detection, fluid handling and immunoassay