Vacuum Research Solution Discussion

ELL block diagram E ELL Pump A C D F To a “J” shaped hook N2N2 B G ELL Vacuum System Wide pipe narrow pipe

Process chamber block diagram A Process Chamber Pump G B E F C D H It controls pressure by the butterfly valve H. It modulates the conductance of the pumping path by either open itself up to increase conductance or the opposite. Pmin = Qload/Seff, 1/Seff = 1/S+1/C. So conductance C can modulate Pmin through Seff. If pressure is too high it should open up H to increase conductance and effective pumping speed.