Glancing Angle Deposition （ GLAD ） Reporter: Zhibin Luo Jul 11 th 2013 Progress report Glancing angle deposition JVSTA 2007 Matthew M. Hawkeye

Substrate Vapor Deposition Source UHV Thin Film Deposition PVDCVD Atomic Layer Deposition Chem. Rev Steven M. George

The atoms are more strongly bound to the substrate than to each other The interaction between the atoms is greater than the interaction with the substrate Atoms will initially cover the surface in monolayers due to the strong interaction with the substrate, but after the deposition of one or several layers, islanding will occur Initial growth of the thin film Layer growth Island growth Layer plus island growth Substrate Atoms

Structure zone models Substrate temperature T/T m The temperature is too low for any significant diffusion to occur Surface diffusion strongly influences the growth There is sufficient energy for bulk diffusion to occur

Substrate Vapor Deposition Source Substrate Incident Vapor Flux α ψ UHV GLAD Glancing Angle Deposition

Archetypal GLAD fabricated microstructures Tilted columns Vertical columnsHelical columns Zig-zag columns

Self-shadowing Stage Ⅱ Stage Ⅰ tanα=2tanβ The atoms evaporate from the surface or buried by the arrival of new atoms

Deposition onto nonplanar substrates Improving the uniformity Postdeposition processing or initial seeds for column growth Embossing 、 laser-direct write lithography 、 monolayers of self-assembled nanospheres 、 optical lithography, etc

Archetypal GLAD fabricated microstructures Tilted columns Vertical columnsHelical columns Zig-zag columns

PhiSweep OrientationSweep axisAngle from central sweep axis

OrientationSweep axis90°turn to create square helix

Film properties and applications First, because the films possess an internal microstructure, the exposed surface area of the film is dramatically higher than in a dense coating Second, the particular geometry of the micro and nanostructures produced with the GLAD technique can directly impact various physical properties Dichrosim 、 birefringence and anisotropic resitivity Dye sensitized solar cells （ DSSCs ） Sensor devices Photocatalyze the degradation of organic chemicals Materials for electrochemical supercapacitors Surface chemistry applications Applications

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