ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas.

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Presentation transcript:

ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas Injection Line Filament Filament Power Supply Transport rod Full Range Gauge

ESD SYSTEM OVERVIEW

Cu SAMPLES

Circuit A A V V +15 V 2-3 A 35 KV

Cu Samples main steps: Machining  Cleaning  Heat treatment  ESD

Bake – out: lower part /

Bake – out: upper part 1B 2B 3B 4B

RGA scans

RGA scans (valve closed)

Degassing: KV

Degassing: KV

Degassing: 9 1.5KV

Calibration: H 2 Calibration Factor

Calibration: N 2 Calibration Factor

Calibration: N 2 2 nd set of data Calibration Factor

Degassing: KV

CURRENT!!!!!

Desorption Yield

15 RGA Cycles for background Signal + biassing of the sample 15 RGA Cycles with the filament switched on filament + sample degassing

Desorption Yield switch on the filament 15 RGA Cycles for background pressure 15 RGA Cycles with the sample biased

Desorption 0.35 KV

Desorption 10 KV

N2 calibration

Energy correlation

Desorption Mechanisms

Stopping power and Range Kinetic energyStopping Power (MeV cm 2 /gr) MeVCollisionRadiativeTotal 1.00E E E E+01

Stopping power and Range Kinetic Energy MeV Range gr/cm2 Thickness cm 1.00E E E-05

Energy correlation

Circuit A A V V +15 V 2-3 A 35 KV

Extra-electron source Positive Polarization [KV] Current [μA] Negative Polarization [KV] Current [μA]

5 KV

Improvements