MEMS Micro-Electo-Mechanical Systems By: Kelly Grahmann Meen 3344

What is MEMS? Micro-Electro-Mechanical Systems Micro-Electro-Mechanical Systems is the integration of elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for making microscopic devices is the integration of elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for making microscopic devices Other Materials used in MEMS Other Materials used in MEMS Gallium Arsinide Gallium Arsinide Titanium Nickel Titanium Nickel Piezoelectric Materials Piezoelectric Materials

How MEMS are made! There are three main building blocks in MEMS There are three main building blocks in MEMS Deposition process Deposition process The ability to deposit thin films of material The ability to deposit thin films of material Lithography Lithography is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation source such as light is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation source such as light Etching Process Etching Process Wet etching where the material is dissolved when immersed in a chemical solution Wet etching where the material is dissolved when immersed in a chemical solution Dry etching where the material is sputtered or dissolved using reactive ions or a vapor phase etchant Dry etching where the material is sputtered or dissolved using reactive ions or a vapor phase etchant

Pictures of MEMS Pictures of MEMS

Expected Characteristics of MEMS In the future, MEMS Technology compared to Conventional Technology should have these effects: In the future, MEMS Technology compared to Conventional Technology should have these effects: Cost reduction Cost reduction Increase functionality Increase functionality Improve reliability Improve reliability Decrease size Decrease size Decrease mass Decrease mass

References oelectromechanical+systems&i=46791,00.asp oelectromechanical+systems&i=46791,00.asp oelectromechanical+systems&i=46791,00.asp oelectromechanical+systems&i=46791,00.asp m m m m ment_id= ment_id= ment_id= ment_id= ms10Apr02.htm ms10Apr02.htm