Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe.

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Presentation transcript:

Yu Shi Dept. of Materials Science & Engineering

10 -6 m10 -7 m10 -8 m10 -9 m m10 -5 m m optical microscope electron microscope Scanning probe microscope photolithography E-beam lithography If you can see, then you should be able to write…

4,000 years ago… Invention of AFM in 1986… 1995 by Jaschke & Butt… 1999… Butt et al. Langmuir 11, 1061 (1995). Mirkin et al. Science 283, 661 (1999).

Source:

Mirkin et al. Science 283, 661 (1999).

Mirkin et al. Nature Nanotechnology 2, 145 (2007).

55,000 cantilevers and 88,000,000 gold dots!

Source:

Q & A…

 “DPN is finding applications in certain areas that impact the semiconductor industry such as mask fabrication, inspection and repair…”  “…However, its unique attributes have positioned it on a different path aimed largely at exploiting the properties and applications of nanopatterned soft materials…” -- C. A. Mirkin (2007) Mirkin et al. Nature Nanotechnology 2, 145 (2007).