Mark Kimbell Prof. Takoudis Manish Singh Yi Yang
Chemical Vapor Deposition Nickel Oxide (NiO) using Ni(C 5 H 5 ) 2 Iron Oxide (Fe 2 O 3 ) using FeC 14 H 18 Nickel Ferrite (NiFe 2 O 4 ) ▪ Choose appropriate conditions based on NiO and Fe 2 O 3 growth rates ▪ XPS to analyze chemical composition ▪ XRD to analyze crystalline structure
The magnetoelectric (ME) effect Ferroelectric and ferromagnetic coupling ▪ Magnetic switching by an applied electric field ▪ Electric polarity switching by an applied magnetic field
Uses Memory storage devices Tunable microwave devices Sensors Transducers C Israel, ND Mathur & JF Scott, Nature Materials 7 (2008) 93
Magnetoelectric composites Made up of a piezoelectric layer and a magnetostrictive layer NiFe 2 O 4
Argon gas Oxygen gas Quartz tube Heater Vacuum pump Substrate
Source of the vapor which is fed into the reaction chamber NICKELOCENE Ni(C 5 H 5 ) 2 N-BUTYLFERROCENE C 14 H 18 Fe
Nickel Oxide Data 8 Nickel Oxide Growth Rate (Reactor = 400 o C) Temperature of Nickelocene ( o C)
9 Iron Oxide Data Temperature of N-Butylferrocene ( o C) Growth Rate (nm/min) Iron Oxide Growth Rate (Reactor = 500 o C)
T reactor = 400 o C T nickelocene = 60 o C T reactor = 400 o C T n-butylferrocene = 65 o C NiO growth rate = 4.6 nm/min Fe 2 O 3 growth rate = 8.5 – 9 nm/min
Cycles T nickelocene T n-butylferrocene T reactor NiO deposition time (s)Fe 2 O 3 deposition time (s)Cycles Co-deposition T nickelocene T n-butylferrocene T reactor Deposition time (min)
Uses x-rays to knock electrons free from surface Measures kinetic energy of electrons to determine chemical composition
Longer cycles (5 cycles, 90 seconds each) ElementAtomic Conc. (%) Ni23.13 Fe27.30 O37.31 C12.27 Ni 2p Fe 2p O 1s C 1s
Shorter cycles (20 cycles, 18 seconds each) ElementAtomic Conc. (%) Ni24.82 Fe28.81 O39.40 C6.97 Ni 2p Fe 2p O 1s C 1s
Co-Deposition ElementAtomic Conc. (%) Ni26.50 Fe22.69 O30.29 C20.52 Ni 2p Fe 2p O 1s C 1s T nickelocene T n-butylferrocene T reactor 60 o C65 o C400 o C
Co-Deposition ElementAtomic Conc. (%) Ni29.17 Fe22.11 O31.07 C17.65 Ni 2p Fe 2p O 1s C 1s T nickelocene T n-butylferrocene T reactor 60 o C 400 o C
Peaks correspond to Fe(III) oxidation state * S. A. Chambers, Y. J. Kim, and Y. Gao Surf. Sci. Spectra (1998) *
* A. N. Mansour, Surf. Sci. Spectra (1994) Peaks correspond to Ni(II) oxidation state *
Do not indicate the presence of NiFe 2 O 4 Probably due to interactions between the two gases Presence of carbon From atmosphere ▪ Argon sputtering From unreacted precursor ▪ Due to relatively low deposition temperature
XPS revealed the presence of both Ni(II) and Fe(III) The ratio of Ni to Fe did not indicate NiFe 2 O4 Different deposition conditions must be used in order to achieve the correct ratios Higher reactor temperature Higher iron precursor temperature Lower nickel precursor temperature
Try different deposition conditions to deposit NiFe 2 O 4 thin films X-ray diffraction (XRD) on NiFe 2 O 4 thin films to determine crystalline structure Anneal to reduce carbon contamination, correct defects / change crystal structure
E. Ascher, H. Rieder, H. Schmid, and H. Stössel, J. Appl. Phys. 37 (1966) 1404 W. Eerenstein, N. D. Mathur and J. F. Scott, Nature 442, (2006) A.M.J.G. Van Run, D.R. Terrell, and J.H. Scholing, Journal of Materials Science 9 (1974) W. Yeh and M. Matsumura, Jpn. J. Appl. Phys. Vol. 36 (1997) Pt. 1, No. 11 M. Singh, Y. Yang, and C.G. Takoudis, Journal of The Electrochemical Society, 155 (9) (2008) D618-D623 S.A. Chambers, Y.J. Kim, and Y. Gao, Surf. Sci. Spectra 5 (1998) 219 S. Oswald and W. Bruckner, Surf. Interface Anal. 36 (2004) 17–22 XPS.htm
EEC-NSF Grant # Dr. Christos Takoudis Graduate students: Yi Yang, Manish Singh, Qian Tao
Argon gas Oxygen gas Quartz tube Heater Vacuum pump Substrate Cycling
Argon gas Oxygen gas Quartz tube Heater Vacuum pump Substrate Co-Deposition
Temperature controllers Precursor containers Reaction chamber Cold trap Vacuum pump nickelocene n-butylferrocene
Used to measure film thickness Light source Polarizer Sample Analyzer Θ