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ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING Surface MEMS Fabrication Blog Dr. Lynn Fuller, Adam Wardas Webpage: http://people.rit.edu/lffeee Microelectronic Engineering Rochester Institute of Technology 82 Lomb Memorial Drive Rochester, NY 14623-5604 Tel (585) 475-2035 Email: Lynn.Fuller@rit.edu Department webpage: http://www.microe.rit.edu 10-18-2015 MEMS_Fabrication_Blog_2015.ppt

INTRODUCTION This document is a blog addressing the fabrication and testing of the MEMS wafers that were made as part of the MCEE770 MEMS Fabrication class. The students in the class provided individual design layouts that were merged into a single project chip design used to create the reticles for this project. Other documents provide details addressing the design, layout and fabrication for this project.

9-1-15 SURFACE MEMS 2015 PROCESS Etch rates 1. Starting wafer 2. PH03 – level 0, Marks 3. ET29 – Zero Etch 4. ID01-Scribe Wafer ID, D1… 5. ET07 – Resist Strip, Recipe FF 6. CL01 – RCA clean 7. OX04 – 6500Å Oxide Tube 1 8. CV01 – LPCVD Poly 5000Å 9. IM01 – Implant P31, 2E16, 60KeV 10. PH03 – level 1 Poly-1 11. ET08 – Poly Etch 12. ET07 – Resist Strip, Recipe FF 13. CL01- RCA Clean 14. CV03 – OX05 700Å Dry Oxide 15. CV02- LPCVD Nitride 4000Å 16. PH03 – level 2 Anchor 17. ET29 – Etch Nitride 18. ET07 - Resist Strip, Recipe FF 19. CL01 – RCA Clean 20. CV03-TEOS SacOx Dep 1.75um 21. PH03 – level 3 SacOx Define 22. ET06 - wet etch SacOx Define Etch 23. ET07- Resist Strip, Recipe FF 24. CL01 – RCA Clean 25. CV01-LPCVD Poly 2um, 140 min 26. PH03 - level 4 No Implant 27. IM01-P31 2E16 100KeV 28. ET07 Resist Strip, Recipe FF 29. OX04-Anneal Recipe 119 30. DE01 Four Point Probe 31. PH03 - level 5 Poly2 32. ET68 - STS Etch 33. ET07 - Resist Strip, Recipe FF 34. CV02 – LPCVD Nitride 4000Å 35. PH03 – level 6 Contact Cut 36. ET29 – Etch Contact Cut 37. ET06 – Etch Oxide 38. ET07 – Resist Strip, Recipe FF 39. CL01 – RCA Clean 40. ME01 – Metal Deposition - Al 41. PH03 – level 7 Metal 42. ET55 – Metal Etch - wet 43. ET07 – Resist Strip 44. PH03 – level 8 – Final SacOx 45. ET66 – Final SacOx Etch 46. ET07 - Resist Strip, Recipe FF 47. SEM1 – Pictures 48. TE01 - Testing 9-1-15 Etch rates LPCVD Si3N4 in 5:1 BHF 120Å/min N+Poly in BHF 50Å/min PECVD SiO2 in 5:1 BHF 2000Å/min

ZERO ETCH AND PHOTORESIST STRIP Today’s Goal: Coat the wafers with photoresist, expose with ASML stepper, develop and plasma etch ASML alignment marks on six wafers. Etch Silicon using Drytek Quad 482 Etcher – Cleaning of chamber for 5 min. in 02 plasma Etching the device wafer for 2 min. in CF4, CHF3 and O2 plasma Inspection of alignment marks on wafer Removal of Photoresist using GaSonics - (recipe FF) Microscope images of alignment marks before and after P.R. removal Before P.R. removal After P.R. removal Drytek Quad GaSonics PR Asher October 19, 2015 Authors: Abhinav, Nikhil, Ranjana, Shruthi, Yamini

TITLE Today’s Goal: Write a sentence or two that describes what is being done. The audience is students at other universities interested in MEMS. This is a template for submitting pages to this blog Duplicate or copy this page Change the title above… use all capital letters Change Today’s Goal Change the date Change the names in the Authors box Move these text boxes around as needed Change size of text boxes Etc. More information Data and Measurements Pictures, especially of students in the lab Pictures of wafer seen through microscope Pictures of tools used Movies if really short and interesting Picture caption October xx, 2015 Authors: Dr. Fuller, Adam Wardas