微波工程期中報告 老師：陳文山 班級：碩研電子一甲 姓名：朱士豪 學號： M

On-Die Synthesized Inductors: Boon or Bane? Jim Wight, John R. Long,L. Richard Carley,and Tom Riley

Abstract Abstract On-Die Spiral Inductors On-Die Spiral Inductors On-Die Active Inductors On-Die Active Inductors MEMS Based Inductors and Resonators MEMS Based Inductors and Resonators Analog FIR Resonators Analog FIR Resonators Conclusion Conclusion

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Alternative approaches have been developed to render the on-die inductor unnecessary. FIR approaches are highly stable in performance and can be tunable, but require high speed clocks and generate unwanted spurious and alias signals. The monolithic spiral inductor has been a key component in the development of portable wireless systems-on-chip in silicon technology. The difference in response provides much-needed common-mode rejection on-chip. Spiral inductors suffer from losses caused by energy dissipated in both the metal windings and the semiconducting silicon substrate.

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Fig 1. (a) Symmetric square spiral inductor physical layout and (b) typical interconnect substrate cross-section. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Figure 2. Typical inductor Q factor versus frequency.(L = 4.5 nH, 10-V-cm silicon substrate.) Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 3. Shielded inductors [6], [9].(a) Ground- shielded square spiral inductor.(b) Differential shielding concept.(c) Differentially shielded symmetric spiral inductor. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 4. Measured inductor Q factor on a 10 Ω-cm substrate. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Table 1. Comparison of measured performance for passive spiral inductors on silicon. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Figure 5. Two-transistor gyrator. (a) Block diagram.(b) Simplified two-FET small-signal equivalent circuit. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Figure 6. A surface acoustic wave filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 7. Example cross section through a bulk acoustic wave resonator. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Figure 8. Simplified electrical model for resonator in vicinity of resonance. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 9. Admittance of BAW resonator as function of frequency. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Figure 10. Sampling RF filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 11. Timing diagram for the current rotator clock buses. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Figure 12. Spectral response of a bandpass filter having 256 tap currents. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 13. Pass band performance of the bandpass filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Table 2. Comparison of performance parameters for the various inductor/resonator realizations. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Spiral inductor Q factor increases with increasing intermetal dielectric and/or metal winding thicknesses and substrate resistivity. Substrate parasitics absorb less energy when the spiral is driven differentially,giving almost 2x improvement in peak-Q. Active inductors are used in specific situations such as peaking the response of RF amplifiers in LO chains, where dynamic range is less critical and a considerable savings in IC area may be realized compared to passive peaking coils.