PROPOSAL : Sputtering System for EMI Shield Coating Date Customer + - Proposer + BMT Written by + Edan Han Classification + Confidential Paper

BS series is the treatment of industrial equipment for EMI Shield coating. The accumulated type of BS series is sputtering. Each procedure for BS series is finished in vacuum pressure. It is easy usage for the design of BS series. [01:01] Equipment Structure : Chamber Unit + Vacuum Pump Unit + Vacuum Measure Unit + Base Unit + Accumulated Unit + Cooling Unit + System frame + Control Standing +

The general testing item for EMI Shield Coating Film [01:02] Testing ItemTypeSpecification Salt Fog Spray 5 % salt water for several times No etching Circled heat beating Alternate cold and hot for several times No peeling Resistance Inspect cater-cornered two pointsLess than 1 or 2 ohm Adhesive Tear and pull the adhesive 3 M No.:610 No peeling Area TestingEMI Shield testingNormal operation

Compare between Spraying type and Sputtering type [02:01] Comparison + Vacuum physi-atmosphere accumulated method : superior adhesive + no dust [Spraying type] Inspect it and find a lots particles of electric conduction on the t ape. The particles make the steady of t erminal products worse. [Sputtering type] No particles of electrical conduction on the tape. + High quality of film : High density + High pure + No fault X 25 X 200X 1000X 200X 1000 [Spraying type] This film includes a lots particles of electric conduction; therefore, the density is low and the shield’s effect i s worse. [Sputtering type] We can’t find the particles. It looks like only one layer of the film which is high density and the shield’s effect is better.

The data for Strong Adhesive [02:02] Testing Picture-A Sectional pictures express that coating film doesn’t peel off the casting of mobile. It means there is strong adhesive between mobile casting and coating film. Coating Machine : BS series

Testing example of EMI Shield coating film [Adhesive testing] [02:03] Testing Pictures-B No particles is peeled from adhesive tape. That means it is good adhesive and good quality of t he film.. Coating machine : BS series A lots particles is peeled from adhesive tape. It has problems for the film. + Sputtering Method + Spraying Method X 25

[02:04] Testing Pictures-C + Sputtering Method (coating machine : BS series) + Hybrid Method (= Thermal Evaporation + Sputtering) x 25 x 100 x 25 x 100 Testing example of EMI Shield coating film [Spraying testing of salt water]

Why do you take sputtering type as EMI shield coating film ? [03:01] Samples + thinner film : High accuracy The film is thin and high density from sputtering type which makes the accuracy of EMI shield type. This is a main factor to take sputtering type of accumulated film. It is easy to control the quality of film. + In depth details and superior broadside, metal made The metal ion is sprayed to around coating film in the vacuum. Therefore, the sputtering type offers superior broadside of metal quality and is more easy to smoothly coat in each details.

The samples is made by the procedure of BS series [03:02] Samples + Coating machine : BS series + Coating method : sputtering

The plan to serve customers [04:01] Service for Customers + Operational training of Equipment : We install the system finished and arrange operational training on line for two week. + Specialized technology and management support : Offer the procedure message : Offer material message : etc. + Active service for customers : Within a half of year after installment, we will visit the customers and test coating machine each two months.