Gas Mass Flowmeters The materials included in this compilation are for the use of Dwyer Instruments, Inc. potential customers and current employees as a resource only. They may not be reproduced, published, or transmitted electronically for commercial purposes. Furthermore, the Company’s name, likeness, product names, and logos, included within these compilations may not be used without specific, written prior permission from Dwyer Instruments, Inc. ©Copyright 2014 Dwyer Instruments, Inc.

Overview GFM2 – Gas Mass Flowmeter GFM3 – Gas Mass Flowmeter Push Button Configuration GFM4 – Gas Mass Flowmeter Temperature and Pressure Monitoring

GFM2 - Specifications Service: Clean dry gases Accuracy: ±1% FS Temperature Limits: 0 to 50 °C Power Supply: 11 to 26 VDC Leak Integrity: 1 x ml/sec of He Flow Ranges: From 10 ml/min to 100 l/min Calibration: NIST certificate standard

GFM2 - Features Programmable totalizer Two user-programmable electromechanical SPDT relays with latching option

GFM2 - Features User-selectable analog 0 to 5 VDC or 4 to 20 mA outputs Internal conversion factors for up to 32 gases Digital interface option RS-232, RS-485, or Profibus

GFM3 - Specifications Service: Clean dry gases Accuracy: ±1% FS Process Temperature Limits: -10 to 50 °C Power Supply: 12 VDC; 15 VDC, or ±24 VDC Leak Integrity: 1 x ml/sec of He Flow Ranges: From 10 ml/min to 100 l/min Calibration: NIST certificate standard

GFM3 - Features Four button keypad and large LCD with backlight Programmable 12 digit totalizer Two SPDT relays with latching option for high or low alarm outputs

GFM3 - Features Internal conversion factors for up to 32 gases Digital interface option RS-232, RS-485, or Profibus

GFM4 - Specifications Service: Clean dry gases Accuracy: ±1% FS Process Temperature Limits: -10 to 50 °C Power Supply: 12 VDC; 15 VDC, or ±24 VDC Leak Integrity: 1 x ml/sec of He Flow Ranges: From 10 ml/min to 100 l/min Calibration: NIST certificate standard

GFM4 - Features Flow, Pressure, and Temperature measurement and output Four button keypad and large LCD with backlight and programmable 12 digit totalizer

GFM4 - Features Two SPDT relays with latching option for high or low flow or pressure alarm outputs Internal conversion factors for up to 32 gases Digital interface option RS-232, RS-485, or Profibus

Flow Scale Options FLOW RATE BODY SIZE REQUIRED FOR THE GIVEN GAS AIRARC2H2C3H8C4H10CH4COCO2HEHFH2N2NH3O2SO2 10ml/min ml/min ml/min ml/min ml/min ml/min ml/min 010 2l/min 010 5l/min l/min l/min l/min l/min l/min l/min l/min 100 l/min 100

Applications Critical flow testing environments such as analytical laboratories Used to measure and control gas flow rate into environmental chambers to provide accurate gas concentrations

Applications Gas burner metering Used to measure gas flow rate to burner, and totalize gas consumption

Applications Widely used in equipment for the semiconductor industry Chemical Vapor Deposition Etching Backside Wafer Cooling

Applications Semiconductor Industry: Chemical Vapor Deposition Precise amounts of precursor gases are flowed into a reaction chamber to create thin film coatings

Applications Semiconductor Industry: Wafer Etching Inert gas flow is used in a high flow purge step between the wafer etching process and the cleaning process to limit wafer exposure to moisture or oxygen

Applications Semiconductor Industry: Backside wafer cooling Gases, such as helium, flow across the wafer to reduce the temperature during processing

Applications Pharmaceutical Industry Mass flowmeters are used to monitor precise air flow rates in tablet coating machinery

Applications Pharmaceutical Industry Mass flowmeters are used to measure the amount of inert and reactant gases into bioreactors

GFM3 – Demonstration GFM3 with Power and communication connection cable

GFM3 – Demonstration 25 pin connection for power, outputs, and communication Process inlet connection Process outlet connection Product label showing model, calibrated flow rate and gas, and serial number User Interface Buttons Backlit LCD Display

GFM3 – Demonstration Process value Calibrated gas Full scale range Totalizer value Flow rate units

GFM3 – Demonstration Display will show some amount of flow while warming up

GFM3 – Demonstration Within a few minutes the flowmeter will settle at zero

GFM3 – Demonstration Changing Units of Measure Press to enter the Main Menu Use the and keys to cycle through the menu and highlight sub-menu “Units of Measure” Press to enter into the sub menu

GFM3 – Demonstration Changing Units of Measure - Continued Use the and keys to cycle through the menu options Highlight “mL/min” and press to select this option Display will return to the Main Menu and “Current Units: mL/min” will be displayed at the bottom Press to exit the main menu

GFM3 – Demonstration Units changes from % to mL/min

GFM3 – Demonstration Configuring the Totalizer Press to enter the Main Menu Use the and keys to cycle through the menu and highlight sub-menu “Totalizer” Press to enter into the sub menu

GFM3 – Demonstration Configuring the Totalizer Use the and keys to cycle through the menu options Highlight “Mode Run/Stop” and press to select this option Press once to highlight “Run” and then press to activate the totalizer TOT: S at the bottom of the display will change to TOT:R to indicate the totalizer is in run mode

GFM3 – Demonstration Configuring the Totalizer The “Start at Flow” option is used to set a minimum flow rate before the totalizer will start accumulating the total flow The “Stop at Total” option is used to set a maximum limit for the total flow accumulation These values are shown at the bottom of Totalizer menu display for reference

GFM3 – Demonstration Configuring the Totalizer The totalizer value can be reset with the “Reset to Zero” option

GFM3 – Demonstration Totalizer