FNI 2A Tools1 Tools of Nanoscience Microscopy  Optical  Electron SEM TEM  Scanning Probe STM AFM NSOM Spectroscopy  Electromagnetic  Mass  Electron Ion beams  FIB Diffraction  X-Ray  Electron  RBS

FNI 2A Tools2 Spectroscopy Electromagnetic  X-Ray EDS WDS XPS/ESCA XRF  UV/Vis UV/Vis Ultraviolet  Infrared FTIR Raman Mass  RGA  GC/MS  SIMS  ToF SIMS  ICP MS  Atom Probe Electron  Auger, AES

FNI 2A Tools3 e-e- γ A+A+ e-e- γ A+A+ Sample Spectroscopy Inputs Outputs

FNI 2A Tools4 e-e- γ Sample Electrons Out Auger electrons Secondary electron imaging Backscattered electron imaging Transmitted electrons Electron diffraction Electrons In Photons out Energy Dispersive Spectroscopy Wavelength Dispersive Spectroscopy Probe: Electrons e-e-

FNI 2A Tools5 γ e-e- γ Sample Photons In Infrared Visible Ultraviolet X-Rays Photons Out FTIR Raman Visible Ultraviolet X-Ray Fluorescence X-Ray Diffraction Electrons Out XPS, X-ray Photoelectron Spectroscopy Probe: Photons

FNI 2A Tools6 A+A+ A+A+ Sample Ions In Ions Out SIMS, Secondary Ion Mass Spectrometry ToF SIMS, Time of Flight SIMS, ICP MS, Inductively Coupled Plasma Mass Spectrometry Probe: Ions

FNI 2A Tools7

FNI 2A Tools8 Nanoscience Tools Optical Microscopes Electron Microscopes  Scanning Electron Microscope (SEM)  Transmission Electron Microscope (TEM) Scanning Probe Microscopes (SPM)  Scanning Tunneling Microscope (STM)  Atomic Force Microscope (AFM) X-Ray Analysis  Energy Dispersive X-ray Spectroscopy (EDS)  Wavelength Dispersive X-ray Spectroscopy (WDS)  X-ray Diffraction (XRD) Focused ion beam (FIB) Mass spectrometry/Residual gas analyzer (Mass spec/RGA)  Secondary ion mass spectrometry (SIMS)  Time of Flight SIMS (ToF SIMS) Fourier transform infrared spectroscopy (FTIR) Auger electron spectroscopy (Auger or AES) Atom probe microscopy X-ray photoelectron spectroscopy (XPS) X-ray fluorescence (XRF) Raman spectroscopy