Maximum Areas in HPK Rule (ATLAS internal only) Y. Unno (KEK) 2015/1/13, 2015/4/8 updated, Y. Unno1

Dicing and Active/Implant Diameters 2015/1/13, 2015/4/8 updated, Y. Unno2

ATLAS12 Design ATLAS12 design: – with the distance of inner edge of bias ring-to-dicing line: 986 µm (W)/side, 910 µm (H)/side – with the width of active area (inner edge-to-inner edge of the bias ring): mm (= 74.5 µm x (1282+1) – 16 µm) The dicing line and the outer edge of the guard ring are well within the circles. 2015/1/13, 2015/4/8 updated, Y. Unno3

ATLAS”X” Design (Barrel) Active area (inside bias ring) being square; – with the width and height of inner edge-to-inner edge of bias ring: x mm 2 – Sensor dicing slightly rectangular: (W) x (H) mm 2 Outer edge of the guard ring (Al+implant) is within the circle of mm. “Slim edge” design: – with the distance of inner edge of the bias ring-to-dicing line: 500 µm (W)/side and 450 µm (H)/side, Strip pitch is µm – Strip pitch has to be an unit of 0.5 µm (HPK rule). 2015/1/13, 2015/4/8 updated, Y. Unno4 2.3% more area than ATLAS12

ATLAS”X” with Strip Pitch 75.5 µm Strip pitch being an unit of 0.5 µm, 75.5 µm. – the width and height of inner edge-to-inner edge of bias ring: (W) x (H) mm 2 – Sensor dicing slightly rectangular; (W) x (H) mm 2 Outer edge of the guard ring (Al+implant) is within the circle of mm. “Slim edge” design: – with the distance of inner edge of the bias ring-to-dicing line: 500 µm (W)/side and 450 µm (H)/side, 2015/1/13, 2015/4/8 updated, Y. Unno5 2.3% more area than ATLAS12

ATLAS”Maxi” Design (Endcap?) Outer edge (Al+implant) of the “edge” ring is within the circle of – with a round edge ring of radius of mm at corner. “Slim edge” design with the distance of inner edge of bias ring-to-dicing line: – 500 µm (W)/side, 450 µm (H)/side Outer edge of the guard ring (Al+implant) is within the circle of mm – with a round edge of the bias ring, i.e., un-equal length of strips near the corner. 2015/1/13, 2015/4/8 updated, Y. Unno6

“Circular” Dicing Constraint/recommendation of HPK – Polygon of a straight section of 2 mm or larger and sections. Thus, an example is – If the length of an edge is 80 mm, the length of the straight section becomes 4 mm. – At a radius of 30 cm, an edge of 80 mm become a polygon of 20 sections with a sagitta of about 27 µm between the adjacent sections. 2015/1/13, 2015/4/8 updated, Y. Unno7