Department of Chemistry , SungKyunKwan University

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Presentation transcript:

Department of Chemistry , SungKyunKwan University Microcontact Printing and its Applications using Self-Assembled Monolayers 이종현 , 정덕영 Department of Chemistry , SungKyunKwan University

Nano structure resolution and various precursors of Soft lithography Introduction Nano structure resolution and various precursors of Soft lithography What is SAMs( self assembled monolayers) ? Microcontact Printing and its Applications  MOCVD  CSD  SOL-GEL Method  Microfabrication INORGANIC MATERIALS LAB.

Soft Lithography method resolution microcontact printing (CP) 35nm replica molding(REM) 30nm mitrotransfer molding(TM) 1 m micromolding in capiliaries(MIMIC) 1 m solvent-assisted micromolding(SAMIM) 60nm Soft Lithography INORGANIC MATERIALS LAB.

Self-Assembled Monolayers (SAMs) SAMs form spontaneously by chemisorption and self-organization of functionalized, long-chain organic molecules onto the surfaces of appropriate substrates. tilted 2-3nm substrate Functional group Alkyl chain Reaction group INORGANIC MATERIALS LAB.

OTS : n-octadecyltrichlorosilane (CH3(CH2)17SiCl3) OTS monolayer OTS : n-octadecyltrichlorosilane (CH3(CH2)17SiCl3) Hydrophobic functional groups Tilted angle 8o - 10o Cross linking Chemical bonding on the surface Oxide layer INORGANIC MATERIALS LAB.

Preparation of PDMS stamp PDMS : poly(dimethylsiloxane) silicone elastomer Photoresist Si Photolithography Si Pour PDMS against Master and Cure PDMS Si Peal off PDMS from Master PDMS “Inking” of SAMs Microcontact Printing PDMS Si Au or other materials INORGANIC MATERIALS LAB.

Microcontact Printing PDMS Spin casting of OTS solution PDMS Ink (OTS solution) Microcontact printing PDMS Si PDMS “Surface chemical Reaction” Silicone oxide layer Si Fabrication of patterned OTS SAMs PDMS PDMS Si (hydrophobic area) (hydrophilic area) (25Å) Si INORGANIC MATERIALS LAB.

Mechanism of surface reaction - 2HCl - HCl + 2H2O + H2O under air(spin casting) in hexane surface - H2O + condensation surface surface INORGANIC MATERIALS LAB.

Selectivity of OTS SAMs Optical Microscope Image Moisture OTS SAMs Substrate : Si(100) p-type wafer OTS SAMs(hydrophobic area) Moisture SiO2 / Si INORGANIC MATERIALS LAB.

MOCVD Applications of patterned OTS SAMs(1) (Metal Organic Chemical Vapor Deposition) Optical Microscope Image TiO2 OTS SAMs  -Step Profile Å Å ∼1300Å INORGANIC MATERIALS LAB.

CSD Applications of patterned OTS SAMs(2) (Chemical Solution Deposition) Optical Microscope Image CdS OTS SAMs 1 100m  -Step Profile INORGANIC MATERIALS LAB.

SOL - GEL Method Applications of patterned OTS SAMs(3) Ta2O5 Optical Microscope Image Ta2O5 Substrate : Slide glass Precursor : Tantalum(V) Ethoxide Deposition Method : spin coating Baking temperature : 450C INORGANIC MATERIALS LAB.

Microfabrication of double layered thin film Optical Microscope Image 200m Ta2O5 CdS ITO Slide glass INORGANIC MATERIALS LAB.

Conclusion & Future prospects Soft lithography tolerates a wide range of materials and surface chemistry. Patterned OTS-SAMs form very stable organic thin films. Optimize all about microcontact printing method. Application of microcontact printing and OTS SAMs on three dimensional nano fabrication. INORGANIC MATERIALS LAB.