Langmuir Probe Plasma parameter measuring system “

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Presentation transcript:

Langmuir Probe Plasma parameter measuring system “

Talk Outline Current as a function of Voltage and first derivative of current / voltage Measuring electron temperature (Kte) Measuring ( I isat ) and ( I esat ) Measuring Saturation Ion current Current ( I ) as a function of Voltage (V), and first derivative of I /V Clean I V Curve in Chlorine Clean EEDF Curve in Chlorine

Current as a Function of Voltage and First Derivative of Current / Voltage

Measuring Electron Temperature (kTe) y = x R 2 = E E E E E E E E E kTe = 3.2 eV Natural Log (Current) (Amps) Probe Bias (Volts)

Measuring ( I isat ) and ( I esat ) N i = m -3 Measuring Ion Current at Plasma Potential (V p ) ( I isat ) N e = m -3 Electron Current at Plasma Potential (V p ) ( I esat )

Measuring Saturation Ion Current

Current (I) as a function of Voltage (V), and first derivative of I/V Clean data in industrial reactor driven by RF frequency Reactor Type: PlamaLab 100 Gas: Argon Pressure: 20mTorr Frequency: 13.56MHz

Clean I V Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

Clean EEDF Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas showing a Maxwellian distribution Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

Summary Describing a Langmuir Trace Measuring plasma parameters and saturation points Research and industrial applications using reactive gases